Microscopic fringe projection profilometry: A review

• Published in: Optics and lasers in engineering Vol. 135; p. 106192
• Main Authors: Hu, Yan, Chen, Qian, Feng, Shijie, Zuo, Chao
• Format: Journal Article
• Language: English
• Published: Elsevier Ltd 01.12.2020
• Subjects: Fringe projection; Microscopic; Optical metrology; Three-dimensional sensing; Microscopic; Fringe projection; Three-dimensional sensing; Optical metrology
• ISSN: 0143-8166; 1873-0302
• DOI: 10.1016/j.optlaseng.2020.106192

•An overview of the state-of-the-art microscopic fringe projection profilometry (MFPP) works is provided.•Measurement principles, systems structures, and key performance indexes of MFPP systems are analyzed and compared.•The potential applications of MFPP are discussed.•Some recommendations about optimum MFPP optical system design are provided. Structured light three-dimensional (3D) measurement technology is considered one of the most reliable 3D data acquisition methods. Driven by the demand for high-precision 3D data acquisition for miniaturized samples in many fields such as surface condition analysis, mechanical function test, and micro-electro-mechanical systems (MEMS) quality inspection, microscopic fringe projection profilometry (MFPP) has been developed rapidly during recent decades. Significant progress has been made in different aspects of MFPP, including its optical configurations, corresponding system calibrations, phase retrieval algorithms, and 3D coordinate reconstruction methods. In addition, the rapid advance in high-frame-rate image sensors, high-speed digital projection technology, and high-performance processors become a powerful vehicle that motivates MFPP techniques to be increasingly applied in high-speed, real-time 3D shape measurement of dynamic samples. In this paper, we present an overview of these state-of-the-art MFPP works by analyzing and comparing the measurement principles, systems structures, and key performance indexes such as the accuracy, field of view (FOV), and speed. We also discuss the potential applications of MFPP and give some recommendations about optimum MFPP optical system design for reference in related applications in the future.