Fabrication and testing of polymer cantilevers for VOC sensors

We investigated the size and mode dependencies of the resonance frequencies and quality factors of PMMA (polymethyl methacrylate) and PC (polycarbonate) cantilevers under atmospheric pressure in order to obtain fundamental data for polymer-based VOC (volatile organic compound) sensors. PMMA cantilev...

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Bibliographic Details
Published inSensors and actuators. A. Physical. Vol. 202; pp. 233 - 239
Main Authors Shiraishi, N., Ikehara, T., Dao, D.V., Sugiyama, S., Ando, Y.
Format Journal Article
LanguageEnglish
Published Elsevier B.V 01.11.2013
Subjects
Actuators
Bonding
Cantilever
Polycarbonates
Polymer
Polymethyl methacrylates
Quality factor
Sensors
Vibration mode
VOC sensor
Volatile organic compounds
VOC sensor
Polymer
Cantilever
Quality factor
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Summary:We investigated the size and mode dependencies of the resonance frequencies and quality factors of PMMA (polymethyl methacrylate) and PC (polycarbonate) cantilevers under atmospheric pressure in order to obtain fundamental data for polymer-based VOC (volatile organic compound) sensors. PMMA cantilevers and PC cantilevers are fabricated by hot embossing, bonding, and polishing techniques. Variations in the vibration mode result in large variations in the resonance frequencies and quality factors of these cantilevers. The measured resonance frequencies correlated well with the theoretical undamped resonance frequency of a flexural-vibrating cantilever. The measured quality factors varied from 10 to more than 100, depending on the vibration mode. A higher mode tended to exhibit a higher quality factor.
Bibliography:ObjectType-Article-2
SourceType-Scholarly Journals-1
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content type line 23
ISSN:0924-4247
1873-3069
DOI:10.1016/j.sna.2013.01.011