A multifunctional silicon-based microscale surgical system

• Published in: Sensors and actuators. A, Physical Vol. 91; no. 3; pp. 351 - 356
• Main Authors: Son, Il-Seok, Lal, Amit, Hubbard, Bill, Olsen, Tim
• Format: Journal Article Conference Proceeding
• Language: English
• Published: Lausanne Elsevier B.V 15.07.2001; Elsevier Science
• Subjects: Acoustic instruments, equipment, and techniques; Acoustical measurements and instrumentation; Acoustics; Applied sciences; Bulk-micromachined; Chemical vapor deposition; Electrical and electronic components, instruments and techniques; Electron device manufacture; Electronics; Exact sciences and technology; Force measurement; Fundamental areas of phenomenology (including applications); General equipment and techniques; Instruments, apparatus, components and techniques common to several branches of physics and astronomy; Lithography, masks and pattern transfer; Microelectromechanical devices; Microelectronic fabrication (materials and surfaces technology); Physics; Piezoresistive sensors; Platinum; Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices; Sensors (chemical, optical, electrical, movement, gas, etc.); remote sensing; Silicon nitride; Silicon nitride/metal blades; Silicon-based surgical tool; Strain measurement; Surgery; Thin films; Ultrasonic strain; Ultrasonic transducers; Ultrasonic transducers; Ultrasonic strain; Piezoresistive sensors; Silicon-based surgical tool; Bulk-micromachined; Silicon nitride/metal blades; Piezoresistive sensor; Composite materials; Micrometry; Surgical equipment; Metals; Micromachining; Surgical materials; Silicon nitrides; Experimental study
• ISSN: 0924-4247; 1873-3069
• DOI: 10.1016/S0924-4247(01)00607-0

In this paper, we report our progress on the development of silicon-based surgical tools. We report on the integration of piezoresistive sensors in noise insensitive Wheatstone configuration, silicon nitride/platinum composite overhanging blades, fluid channels, and electrical packaging features to make the device highly multifunctional. Multiple polysilicon piezoresistors were integrated onto bulk-micromachined ultrasonic transducers that were used to measure the ultrasonic strain, and the force applied to the cutting tip. The use of thin silicon nitride/metal composites films for cutting in vitro human retinas at the cellular level is demonstrated.