Nano silver-catalyzed chemical etching of polycrystalline silicon wafer for solar cell application

Silver nanoparticles were deposited on the surface of polycrystalline silicon wafer via vacuum thermal evaporation and metal-catalyzed chemical etching (MCCE) was conducted in a HF-H2O2 etching system. Treatment of the etched silicon wafer with HF transformed the textured structure on the surface fr...

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Bibliographic Details
Published inAIP advances Vol. 6; no. 3; pp. 035320 - 035320-4
Main Authors Chen, S. R., Liang, Z. C., Wang, D. L.
Format Journal Article
LanguageEnglish
Published Melville American Institute of Physics 01.03.2016
AIP Publishing LLC
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Summary:Silver nanoparticles were deposited on the surface of polycrystalline silicon wafer via vacuum thermal evaporation and metal-catalyzed chemical etching (MCCE) was conducted in a HF-H2O2 etching system. Treatment of the etched silicon wafer with HF transformed the textured structure on the surface from nanorods into nanocones. An etching time of 30 s and treatment with HF resulted in nanocones with uniform size distribution and a reflectivity as low as 1.98% across a spectral range from 300 to 1000 nm.
ISSN:2158-3226
2158-3226
DOI:10.1063/1.4945398