Fast fabrication of curved microlens array using DMD-based lithography

Curved microlens array is the core element of the biologically inspired artificial compound eye. Many existing fabrication processes remain expensive and complicated, which limits a broad range of application of the artificial compound eye. In this paper, we report a fast fabrication method for curv...

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Bibliographic Details
Published inAIP advances Vol. 6; no. 1; pp. 015319 - 015319-7
Main Authors Zhang, Zhimin, Gao, Yiqing, Luo, Ningning, Zhong, Kejun
Format Journal Article
LanguageEnglish
Published Melville American Institute of Physics 01.01.2016
AIP Publishing LLC
Subjects
Arrays
Lithography
Microscopes
Optical properties
Polydimethylsiloxane
Product lines
Silicone resins
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Summary:Curved microlens array is the core element of the biologically inspired artificial compound eye. Many existing fabrication processes remain expensive and complicated, which limits a broad range of application of the artificial compound eye. In this paper, we report a fast fabrication method for curved microlens array by using DMD-based maskless lithography. When a three-dimensional (3D) target curved profile is projected into a two-dimensional (2D) mask, arbitrary curved microlens array can be flexibly and efficiently obtained by utilizing DMD-based lithography. In order to verify the feasibility of this method, a curved PDMS microlens array with 90 micro lenslets has been fabricated. The physical and optical characteristics of the fabricated microlens array suggest that this method is potentially suitable for applications in artificial compound eye.
ISSN:2158-3226
2158-3226
DOI:10.1063/1.4941356