Ion beam, focused ion beam, and plasma discharge machining

Non-conventional methods of machining are used for many engineering applications where the traditional processes fail to be cost-effective. Such processes include Ion Beam Machining (IBM), focused ion beam (FIB) machining and plasma discharge machining. The mechanisms of material removal and associa...

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Bibliographic Details
Published inCIRP annals Vol. 58; no. 2; pp. 647 - 662
Main Authors Allen, D.M., Shore, P., Evans, R.W., Fanara, C., O’Brien, W., Marson, S., O’Neill, W.
Format Journal Article Conference Proceeding
LanguageEnglish
Published Kidlington Elsevier Ltd 2009
Elsevier
Subjects
Applied sciences
Chemical machining
Computer programs
Discharge
Exact sciences and technology
Focused Ion Beam Machining
Hardware
Industrial applications
Ion Beam Machining
Ion beams
Machining
Mechanical engineering. Machine design
Plasma discharge machining
Software
Plasma discharge machining
Ion Beam Machining
Focused Ion Beam Machining
Engineering design
Ion beam
Machining
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Summary:Non-conventional methods of machining are used for many engineering applications where the traditional processes fail to be cost-effective. Such processes include Ion Beam Machining (IBM), focused ion beam (FIB) machining and plasma discharge machining. The mechanisms of material removal and associated hardware and software developed for industrial applications of these fascinating electro-physical and chemical machining processes are reviewed together with the latest research findings.
Bibliography:ObjectType-Article-2
SourceType-Scholarly Journals-1
ObjectType-Feature-1
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ISSN:0007-8506
DOI:10.1016/j.cirp.2009.09.007