Design and fabrication of a micro electromagnetic vibration energy harvester

This paper presents a new micro electromagnetic energy harvester that can convert transverse vibration energy to electrical power.It mainly consists of folded beams,a permanent magnet and copper planar coils.The calculated value of the natural frequency is 274 Hz and electromagnetic simulation shows...

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Bibliographic Details
Published inJournal of semiconductors Vol. 32; no. 10; pp. 74 - 77
Main Author 王鹏 李伟 车录锋
Format Journal Article
LanguageEnglish
Published IOP Publishing 01.10.2011
Subjects
Coils
Density
Direct power generation
Electric power generation
Energy harvesting
Harvesters
Prototypes
Semiconductors
Vibration
制造
平面线圈
微型
振动能量
收割机
最大输出功率
电磁能量
设计
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Summary:This paper presents a new micro electromagnetic energy harvester that can convert transverse vibration energy to electrical power.It mainly consists of folded beams,a permanent magnet and copper planar coils.The calculated value of the natural frequency is 274 Hz and electromagnetic simulation shows that the magnetic flux density will decrease sharply with increasing space between the magnet and coils.A prototype has been fabricated using MEMS micromachining technology.The testing results show that at the resonant frequency of 242 Hz,the prototype can generate 0.55μW of maximal output power with peak-peak voltage of 28 m V for 0.5g（g = 9.8 m/s~2） external acceleration.
Bibliography:Wang Peng~（1,2）,Li Wei~1,and Che Lufeng~＋ 1 State Key Laboratory of Transducer Technology,Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences,Shanghai 200050,China 2 Graduate University of the Chinese Academy of Sciences,Beijing 100049,China
electromagnetic energy harvester; MEMS; resonance; permanent magnet
11-5781/TN
This paper presents a new micro electromagnetic energy harvester that can convert transverse vibration energy to electrical power.It mainly consists of folded beams,a permanent magnet and copper planar coils.The calculated value of the natural frequency is 274 Hz and electromagnetic simulation shows that the magnetic flux density will decrease sharply with increasing space between the magnet and coils.A prototype has been fabricated using MEMS micromachining technology.The testing results show that at the resonant frequency of 242 Hz,the prototype can generate 0.55μW of maximal output power with peak-peak voltage of 28 m V for 0.5g（g = 9.8 m/s~2） external acceleration.
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ISSN:1674-4926
DOI:10.1088/1674-4926/32/10/104009