High-performance flexible thin-film transistors fabricated using print-transferrable polycrystalline silicon membranes on a plastic substrate

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Bibliographic Details
Published inSemiconductor science and technology Vol. 26; no. 2; p. 025005
Main Authors Qin, Guoxuan, Yuan, Hao-Chih, Yang, Hongjun, Zhou, Weidong, Ma, Zhenqiang
Format Journal Article
LanguageEnglish
Published Bristol IOP Publishing 01.02.2011
Institute of Physics
Subjects
Applied sciences
Electronics
Exact sciences and technology
Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices
Transistors
Ethylene terephthalate polymer
Grain size
High performance
Buried layer
Annealing
Oxide layer
Doping
Polycrystal
High temperature
Silicon on insulator technology
Flexible structure
Recrystallization
Silicon
Thin film transistor
Plastics
Residual stress
Wafer
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ISSN:0268-1242
1361-6641
DOI:10.1088/0268-1242/26/2/025005