Effect of electromagnetic waves and higher harmonics in capacitively coupled plasma phenomena

• Published in: Journal of physics. D, Applied physics Vol. 46; no. 47; pp. 472001 - 5
• Main Authors: Upadhyay, R R, Sawada, I, Ventzek, P L G, Raja, L L
• Format: Journal Article
• Language: English
• Published: Bristol IOP Publishing 27.11.2013; Institute of Physics
• Subjects: capacitively coupled plasma; Computer simulation; electromagnetic wave phenomena; Electromagnetic waves; Exact sciences and technology; Harmonics; High frequencies; Higher harmonics; Laser-plasma interactions; Physics; Physics of gases, plasmas and electric discharges; Physics of plasmas and electric discharges; Plasma (physics); Plasma density; plasma non-uniformity; Simulation; Plasma reactor; Power spectra; Digital simulation; Theoretical study; Capacitive coupling; Plasma electromagnetic wave propagation; Experimental study; High frequency; Plasma density; Coupled plasma
• ISSN: 0022-3727; 1361-6463
• DOI: 10.1088/0022-3727/46/47/472001

High-resolution self-consistent numerical simulation of electromagnetic wave phenomena in an axisymmetric capacitively coupled plasma reactor is reported. A prominent centre-peaked plasma density profile is observed for driving frequencies of 60 MHz and is consistent with observations in the literature and accompanying experimental studies. A power spectrum of the simulated wave electric field reveals the presence of well-resolved high frequency harmonic content up to the 20th harmonic of the excitation frequency; an observation that has also been reported in experiments. Importantly, the simulation results reveal that the occurrence of higher harmonics is strongly correlated with the occurrence of a centre-peaked plasma density profile.