Modeling and experimental verification of low-frequency MEMS energy harvesting from ambient vibrations

• Published in: Journal of micromechanics and microengineering Vol. 21; no. 4; p. 045029
• Main Authors: Miller, L M, Halvorsen, E, Dong, T, Wright, P K
• Format: Journal Article
• Language: English
• Published: Bristol IOP Publishing 01.04.2011; Institute of Physics
• Subjects: Applied sciences; Electronics; Exact sciences and technology; General equipment and techniques; Instruments, apparatus, components and techniques common to several branches of physics and astronomy; Mechanical engineering. Machine design; Mechanical instruments, equipment and techniques; Microelectronic fabrication (materials and surfaces technology); Micromechanical devices and systems; Physics; Precision engineering, watch making; Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices; Transducers; Low energy; Vibrations; Piezoelectric transducers; Resonance frequency; Energy recovery; Modelling; Vibration test; Experimental study; Low frequency; Vibration source; Vibrometer; Microelectromechanical device
• ISSN: 0960-1317; 1361-6439
• DOI: 10.1088/0960-1317/21/4/045029

Micro-fabricated piezoelectric vibration energy harvesters with resonance frequencies of 31–232 Hz are characterized and deployed for testing on ambient vibration sources in the machine room of a large building. A survey of 23 ambient vibration sources in the machine room is presented. A model is developed which uses a discretization method to accept measured arbitrary acceleration data as an input and gives harvester response as output. The modeled and measured output from the energy harvesters is compared for both vibrometer and ambient vibration sources. The energy harvesters produced up to 43 nW rms g −2 on a laboratory vibrometer and 10 nW g −2 on ambient vibration sources typically in large buildings.