Full 3D-3C velocity measurement inside a liquid immersion droplet

• Published in: Experiments in fluids Vol. 51; no. 2; pp. 395 - 405
• Main Authors: Kim, Hyoungsoo, Große, Sebastian, Elsinga, Gerrit E., Westerweel, Jerry
• Format: Journal Article
• Language: English
• Published: Berlin/Heidelberg Springer-Verlag 01.08.2011; Springer
• Subjects: Applied sciences; Contact; Droplets; Electronics; Engineering; Engineering Fluid Dynamics; Engineering Thermodynamics; Exact sciences and technology; Fluid dynamics; Fluid flow; Fluid- and Aerodynamics; Fundamental areas of phenomenology (including applications); Heat and Mass Transfer; Immersion; Instrumentation for fluid dynamics; Internal flow; Liquids; Lithography; Microelectronic fabrication (materials and surfaces technology); Physics; Research Article; Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices; Capillary Number; Contact Angle; Advance Contact Angle; Particle Tracking Velocimetry; Particle Image Velocimetry; Microelectronic fabrication; Internal flow; Three dimensional flow; Test facility; Lithography; Speed measurement; Tomography; Particle image velocimetry; Immersion; Experimental study; Droplet; Wafer
• ISSN: 0723-4864; 1432-1114
• DOI: 10.1007/s00348-011-1053-y

We describe a tomographic PIV system for the measurement of the internal flow in a droplet over a stagnant and a moving surface. The flow condition is representative of the flow in an immersion droplet applied in a liquid immersion lithography machine. We quantify the accuracy and reliability of the measurements and compare the shape of the reconstructed measurement volume to shape measurements by means of shadowgraphy. First results indicate the internal flow pattern near the receding contact line, showing a small recirculation region.