Novel piezoelectric actuation mechanism for a gimbal-less mirror in 2D raster scanning applications

• Published in: Journal of micromechanics and microengineering Vol. 21; no. 7; p. 075001
• Main Authors: Koh, Kah How, Kobayashi, Takeshi, Xie, Jin, Yu, Aibin, Lee, Chengkuo
• Format: Journal Article
• Language: English
• Published: Bristol IOP Publishing 01.07.2011; Institute of Physics
• Subjects: Applied sciences; Electronics; Exact sciences and technology; Fundamental areas of phenomenology (including applications); General equipment and techniques; Instruments, apparatus, components and techniques common to several branches of physics and astronomy; Lenses, prisms, and mirrors; Microelectronic fabrication (materials and surfaces technology); Optical elements, devices, and systems; Optics; Physics; Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices; Transducers; Bulk micromachining; Silicon-on-insulator; Thick films; Electrode material; PZT; Experimental study; Piezoceramic materials; Cantilever beam; Thin films; Thick film devices; Piezoelectric actuators; Piezoelectricity; Surface micromachining; Silicon; Mirrors; Micromirrors; Plates
• ISSN: 0960-1317; 1361-6439
• DOI: 10.1088/0960-1317/21/7/075001