Fabrication of a peristaltic PDMS micropump

This paper presents fabrication and drive test of a peristaltic PDMS micropump actuated by the thermopneumatic force. The micropump consists of the three peristaltic-type actuator chambers with microheaters on the glass substrate and a microchannel connecting the chambers and the inlet/outlet port....

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Bibliographic Details
Published inSensors and actuators. A. Physical. Vol. 123; pp. 453 - 458
Main Authors Jeong, Ok Chan, Park, Sin Wook, Yang, Sang Sik, Pak, James Jungho
Format Journal Article
LanguageEnglish
Published Elsevier B.V 23.09.2005
Subjects
Actuators
Camera tubes
Chambers
Curing
Flow rate
Micropumps
Molding (process)
Peristaltic thermopneumatic micropump
Polydimethylsiloxane (PDMS)
Silicone resins
Flow rate
Polydimethylsiloxane (PDMS)
Peristaltic thermopneumatic micropump
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Summary:This paper presents fabrication and drive test of a peristaltic PDMS micropump actuated by the thermopneumatic force. The micropump consists of the three peristaltic-type actuator chambers with microheaters on the glass substrate and a microchannel connecting the chambers and the inlet/outlet port. The micropump is fabricated by the spin-coating process, the two-step curing process, the molding process using negative photoresist, etc. The diameter and the thickness of the actuator diaphragm are 2.5 mm and 30 μm, respectively. The meniscus motion in the capillary tube is observed with a video camera and the flow rate of the micropump is calculated through the frame analysis of the recorded video data. The maximum flow rate of the micropump is about 0.36 μL/s at 2 Hz for the zero hydraulic pressure difference, when the three-phase input voltage is 20 V.
Bibliography:ObjectType-Article-2
SourceType-Scholarly Journals-1
ObjectType-Feature-1
content type line 23
ISSN:0924-4247
1873-3069
DOI:10.1016/j.sna.2005.01.035