Quick and reliable technology for fabrication of stand-alone BSCCO mesas

The technology of wet etching allowing fabrication of stand-alone BSCCO mesa structures was proposed. The produced mesas can be made much thicker than ones usually being studied. The time required for the fabrication is much smaller in comparison with the standard method of ion milling. The process...

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Bibliographic Details
Published inSuperconductor science & technology Vol. 28; no. 4; pp. 45006 - 5
Main Authors Vopilkin, E A, Chiginev, A V, Revin, L S, Tropanova, A N, Shuleshova, I Yu, Okhapkin, A I, Shovkun, A D, Kulakov, A B, Pankratov, A L
Format Journal Article
LanguageEnglish
Published IOP Publishing 01.04.2015
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Summary:The technology of wet etching allowing fabrication of stand-alone BSCCO mesa structures was proposed. The produced mesas can be made much thicker than ones usually being studied. The time required for the fabrication is much smaller in comparison with the standard method of ion milling. The process used is controllable which provides acceptable precision of mesa fabrication. The IV characteristics of the sample showing Josephson nature were obtained. The qualitative comparison with characteristics of similar structures fabricated by other groups was carried out.
Bibliography:ObjectType-Article-1
SourceType-Scholarly Journals-1
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ISSN:0953-2048
1361-6668
DOI:10.1088/0953-2048/28/4/045006