Effects of adsorption and roughness upon the collision processes at the convertor surface of a plasma sputter negative ion source

Atomic collision processes associated with surface production of negative hydrogen ions (H(-)) by particle reflection at molybdenum surface immersed in hydrogen plasma have been investigated. To calculate sputtering yields of Cs, as well as energy spectra and angular distributions of reflected hydro...

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Bibliographic Details
Published inReview of scientific instruments Vol. 83; no. 2; p. 02A722
Main Authors Kenmotsu, T, Wada, M
Format Journal Article
LanguageEnglish
Published United States 01.02.2012
Subjects
Adsorption
Fractals
Hydrogen - chemistry
Plasma Gases - chemistry
Radiometry - instrumentation
Surface Properties
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Summary:Atomic collision processes associated with surface production of negative hydrogen ions (H(-)) by particle reflection at molybdenum surface immersed in hydrogen plasma have been investigated. To calculate sputtering yields of Cs, as well as energy spectra and angular distributions of reflected hydrogen atoms from molybdenum surface by H(+) ion and Cs(+) ion bombardments, a Monte Carlo simulation code ACAT (Atomic Collision in Amorphous Target) was run with the corresponding surface conditions. A fractal surface model has been developed and adopted to ACAT for evaluating the effect due to roughness of target material. The results obtained with ACAT have indicated that the retention of hydrogen atoms leads to the reduction in sputtering yields of Cs, and the surface roughness does largely affect the sputtering yields of Cs.
ISSN:1089-7623
DOI:10.1063/1.3673624