A microactuator based on the decomposition of an energetic material for disposable lab-on-chip applications: fabrication and test

• Published in: Journal of micromechanics and microengineering Vol. 19; no. 1; pp. 015006 - 015006 (8)
• Main Authors: Ardila Rodríguez, Gustavo A, Suhard, Samuel, Rossi, Carole, Estève, Daniel, Fau, Pierre, Sabo-Etienne, Sylviane, Mingotaud, Anne Françoise, Mauzac, Monique, Chaudret, Bruno
• Format: Journal Article
• Language: English
• Published: Bristol IOP Publishing 01.01.2009; Institute of Physics
• Subjects: Applied fluid mechanics; Applied sciences; Biological and medical sciences; Biosensors; Biotechnology; Chemical Sciences; Exact sciences and technology; Fluid dynamics; Fluidics; Fundamental and applied biological sciences. Psychology; Fundamental areas of phenomenology (including applications); Instruments, apparatus, components and techniques common to several branches of physics and astronomy; Mechanical engineering. Machine design; Mechanical instruments, equipment and techniques; Methods. Procedures. Technologies; Micromechanical devices and systems; Physics; Polymers; Precision engineering, watch making; Various methods and equipments; Biotechnology; Biocompatibility; Membrane; Microactuators; Silicon; System on a chip; Low power; Experimental study; Microelectromechanical device; Actuator; Ejection; Fluidics
• ISSN: 0960-1317; 1361-6439
• DOI: 10.1088/0960-1317/19/1/015006

A microactuator consisting of an inflatable elastic membrane based on the decomposition of a small mass of energetic material deposited on a silicon microstructured platform is presented for disposable lab-on-a-chip applications. The energetic-material-based actuator is characterized by its small size ( < 0.25 mm2 X 100 mum), bio-compatibility and capability of generating sufficient overpressures ( > 10 kPa) under low electrical power ( < 100 mW) to eject a few nanolitres of fluid. This device has been fabricated using MEMS and microfluidic-compatible technology. The characterization of the actuation gave a pressurization of 13 kPa and a membrane deformation of 46 mum for an electrical initial power of 90 mW (6.5 V, 13.9 mA). All these characteristics make such a microactuator well adapted for microfluidic applications and especially for the ejection of fluids contained in micro-channels of a disposable lab-on-a-chip.