A study of the electrical properties of graphene-incorporated direct-patternable ZnO thin films

• Published in: Thin solid films Vol. 529; pp. 234 - 237
• Main Authors: Kim, Hyuncheol, Baek, Jong Tae, Park, Hyung-Ho
• Format: Journal Article Conference Proceeding
• Language: English
• Published: Amsterdam Elsevier B.V 01.02.2013; Elsevier
• Subjects: Condensed matter: electronic structure, electrical, magnetic, and optical properties; Condensed matter: structure, mechanical and thermal properties; Cross-disciplinary physics: materials science; rheology; Crystallinity; Deposition; Direct-patterning; Electrical properties; Electrical property; Electronic structure and electrical properties of surfaces, interfaces, thin films and low-dimensional structures; Electronic transport phenomena in thin films and low-dimensional structures; Exact sciences and technology; Fullerenes and related materials; diamonds, graphite; Graphene; Growth from solutions; Materials science; Methods of crystal growth; physics of crystal growth; Photochemical; Physics; Specific materials; Structure and morphology; thickness; Surfaces and interfaces; thin films and whiskers (structure and nonelectronic properties); Thin film structure and morphology; Thin films; Transmittance; Zinc oxide; ZnO thin films; ZnO thin films; Electrical property; Direct-patterning; Graphene; Transmittance; Patterning; Electrical conductivity; Dry etching; Electrical properties; Dry process; Crystallinity; Thin films; Crystal growth from solutions; Zinc oxide; Photoresists
• ISSN: 0040-6090; 1879-2731
• DOI: 10.1016/j.tsf.2012.09.034

A direct-patternable ZnO thin film was prepared by photochemical solution deposition and the electrical properties were improved by the incorporation of graphene. The transmittance of graphene-incorporated ZnO thin films was similar to that of ZnO thin film due to the incorporation of graphene, which slightly decreased the crystallinity of the ZnO thin films. In addition, the resistivity was improved due to the enhanced mobility due to the π-bond nature of the graphene surface. Graphene-incorporated ZnO thin film was direct-patterned through photochemical solution deposition without a photoresist or conventional dry etching process. These results suggest that a micro-patterned system can be simply fabricated at low cost, and the electrical properties of ZnO thin films can be improved by incorporating graphene. ► Transparent ZnO thin film ► π-bond on surface of graphene has higher electrical mobility. ► Graphene incorporation was not affected to crystallinity and transmittance. ► Electrical conductivity was enhanced by graphene incorporation.