Parametric amplification in a resonant sensing array

• Published in: Journal of micromechanics and microengineering Vol. 22; no. 3; pp. 35004 - 7
• Main Authors: Yie, Zi, Miller, Nicholas J, Shaw, Steven W, Turner, Kimberly L
• Format: Journal Article
• Language: English
• Published: Bristol IOP Publishing 01.03.2012; Institute of Physics
• Subjects: Amplification; Applied sciences; Arrays; Detection; Electronics; Exact sciences and technology; Instruments, apparatus, components and techniques common to several branches of physics and astronomy; Joining; Mechanical engineering. Machine design; Mechanical instruments, equipment and techniques; Microelectronic fabrication (materials and surfaces technology); Microengineering; Micromechanical devices and systems; Micromechanics; Phases; Physics; Precision engineering, watch making; Quality factor; Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices; Density measurement; Vibration; Q factor; Sensor array; Parametric amplification
• ISSN: 0960-1317; 1361-6439
• DOI: 10.1088/0960-1317/22/3/035004

We demonstrate parametric amplification of a multidegree of freedom resonant mass sensing array via an applied base motion containing the appropriate frequency content and phases. Applying parametric forcing in this manner is simple and aligns naturally with the vibrational properties of the sensing structure. Using this technique, we observe an increase in the quality factors of the coupled array resonances, which provides an effective means of improving device sensitivity.