Facile Routes to Patterned Surface Neutralization Layers for Block Copolymer Lithography

A new crosslinking system based on azide‐functionalized random copolymers has been defined for the preparation of substrates with controllable surface interactions. The azido group is used for both thermal‐ and photo‐crosslinking, which is found to be very efficient. Furthermore, the use of UV irrad...

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Published inAdvanced materials (Weinheim) Vol. 19; no. 24; pp. 4552 - 4557
Main Authors Bang, J., Bae, J., Löwenhielm, P., Spiessberger, C., Given-Beck, S. A., Russell, T. P., Hawker, C. J.
Format Journal Article
LanguageEnglish
Published Weinheim WILEY-VCH Verlag 17.12.2007
WILEY‐VCH Verlag
Subjects
Block Copolymers
Crosslinking
Poly(methyl methacrylate)
Polystyrene
Surface Patterning
Thin Films
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Summary:A new crosslinking system based on azide‐functionalized random copolymers has been defined for the preparation of substrates with controllable surface interactions. The azido group is used for both thermal‐ and photo‐crosslinking, which is found to be very efficient. Furthermore, the use of UV irradiation for crosslinking enables the preparation of patterned surfaces by conventional photolithographic techniques, combining the “bottom‐up” self‐assembly of block copolymer strategies with traditional “top‐down” photolithographic methods.
Bibliography:UMass MRSEC - No. DMR-0213695
SRC-NRI - No. 2006-NE-1549
ark:/67375/WNG-SLG0L6N8-Q
istex:36B76111F23973CEED821795C0CEF43676EE078F
National Science Foundation under the MRSEC program - No. UCSB MRL, DMR-0520415
ArticleID:ADMA200701866
Korean Government - No. KRF-2005-214-D00272
Korea Research Foundation Grant
This work was supported by the National Science Foundation under the MRSEC program (UCSB MRL, DMR-0520415 and UMass MRSEC, DMR-0213695), through an SRC-NRI supplement grant (2006-NE-1549), the Department of Energy, Office of Basic Energy Science and by the Korea Research Foundation Grant funded by the Korean Government (KRF-2005-214-D00272). The IMI Program of the National Science Foundation under Award No. DMR04-09848 is also thanked for providing a CISEI internship to C.S.
Department of Energy, Office of Basic Energy Science
This work was supported by the National Science Foundation under the MRSEC program (UCSB MRL, DMR‐0520415 and UMass MRSEC, DMR‐0213695), through an SRC‐NRI supplement grant (2006‐NE‐1549), the Department of Energy, Office of Basic Energy Science and by the Korea Research Foundation Grant funded by the Korean Government (KRF‐2005‐214‐D00272). The IMI Program of the National Science Foundation under Award No. DMR04‐09848 is also thanked for providing a CISEI internship to C.S.
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ISSN:0935-9648
1521-4095
DOI:10.1002/adma.200701866