Step engineering for nucleation and domain orientation control in WSe2 epitaxy on c-plane sapphire
Epitaxial growth of two-dimensional transition metal dichalcogenides on sapphire has emerged as a promising route to wafer-scale single-crystal films. Steps on the sapphire act as sites for transition metal dichalcogenide nucleation and can impart a preferred domain orientation, resulting in a subst...
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Published in | Nature nanotechnology Vol. 18; no. 11; pp. 1295 - 1302 |
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Main Authors | , , , , , , , , , , , , , , , , , , , , |
Format | Journal Article |
Language | English |
Published |
London
Nature Publishing Group UK
01.11.2023
Nature Publishing Group |
Subjects | |
Online Access | Get full text |
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Summary: | Epitaxial growth of two-dimensional transition metal dichalcogenides on sapphire has emerged as a promising route to wafer-scale single-crystal films. Steps on the sapphire act as sites for transition metal dichalcogenide nucleation and can impart a preferred domain orientation, resulting in a substantial reduction in mirror twins. Here we demonstrate control of both the nucleation site and unidirectional growth direction of WSe
2
on
c
-plane sapphire by metal–organic chemical vapour deposition. The unidirectional orientation is found to be intimately tied to growth conditions via changes in the sapphire surface chemistry that control the step edge location of WSe
2
nucleation, imparting either a 0° or 60° orientation relative to the underlying sapphire lattice. The results provide insight into the role of surface chemistry on transition metal dichalcogenide nucleation and domain alignment and demonstrate the ability to engineer domain orientation over wafer-scale substrates.
Surface chemistry controls the location of WSe
2
nucleation on a stepped sapphire substrate. Preferential nucleation at either the top or bottom step edge can be used to minimize mirror twin domains and produce unidirectional WSe
2
monolayers. |
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Bibliography: | ObjectType-Article-1 SourceType-Scholarly Journals-1 ObjectType-Feature-2 content type line 23 USDOE Office of Science (SC), Basic Energy Sciences (BES). Scientific User Facilities (SUF) National Science Foundation (NSF) AC05-00OR22725; FA9550-22-1-0408; FA9550-21-1-0460; DGE1255832; ECCS-1943895; ECCS-2246564; DMR-1654107; DMR-1539916; DMR-2039351 Defense Technical Information Center (DTIE) US Air Force Office of Scientific Research (AFOSR) |
ISSN: | 1748-3387 1748-3395 |
DOI: | 10.1038/s41565-023-01456-6 |