Wang, W., Lu, X., Wu, X., Zhang, Y., Wang, R., Yang, D., & Pi, X. (2023). Chemical–Mechanical Polishing of 4H Silicon Carbide Wafers. Advanced materials interfaces, 10(13), -n/a. https://doi.org/10.1002/admi.202202369
Chicago Style (17th ed.) CitationWang, Wantang, Xuesong Lu, Xinke Wu, Yiqiang Zhang, Rong Wang, Deren Yang, and Xiaodong Pi. "Chemical–Mechanical Polishing of 4H Silicon Carbide Wafers." Advanced Materials Interfaces 10, no. 13 (2023): -n/a. https://doi.org/10.1002/admi.202202369.
MLA (9th ed.) CitationWang, Wantang, et al. "Chemical–Mechanical Polishing of 4H Silicon Carbide Wafers." Advanced Materials Interfaces, vol. 10, no. 13, 2023, pp. -n/a, https://doi.org/10.1002/admi.202202369.
Warning: These citations may not always be 100% accurate.