Logic circuits based on individual semiconducting and metallic carbon-nanotube devices

• Published in: Nanotechnology Vol. 21; no. 47; p. 475207
• Main Authors: Ryu, Hyeyeon, Kälblein, Daniel, Weitz, R Thomas, Ante, Frederik, Zschieschang, Ute, Kern, Klaus, Schmidt, Oliver G, Klauk, Hagen
• Format: Journal Article
• Language: English
• Published: England IOP Publishing 26.11.2010
• Subjects: Carbon nanotubes; Devices; Glass; Logic circuits; Nanostructure; Nanotubes; Semiconductor devices; Transistors
• ISSN: 0957-4484; 1361-6528
• DOI: 10.1088/0957-4484/21/47/475207

Nanoscale transistors employing an individual semiconducting carbon nanotube as the channel hold great potential for logic circuits with large integration densities that can be manufactured on glass or plastic substrates. Carbon nanotubes are usually produced as a mixture of semiconducting and metallic nanotubes. Since only semiconducting nanotubes yield transistors, the metallic nanotubes are typically not utilized. However, integrated circuits often require not only transistors, but also resistive load devices. Here we show that many of the metallic carbon nanotubes that are deposited on the substrate along with the semiconducting nanotubes can be conveniently utilized as load resistors with favorable characteristics for the design of integrated circuits. We also demonstrate the fabrication of arrays of transistors and resistors, each based on an individual semiconducting or metallic carbon nanotube, and their integration on glass substrates into logic circuits with switching frequencies of up to 500 kHz using a custom-designed metal interconnect layer.