Modeling of Capacitive MEMS Microphone with Square Membrane or Plate Using Integral Method
An analytical approach describing the acoustic pressure field inside a thin layer of thermo-viscous fluid trapped between the square membrane or plate and planar backing electrode of the electrostatic receiver, which involves integral formulation, is presented. The use of integral formulation enable...
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| Published in | Procedia engineering Vol. 120; pp. 418 - 421 |
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| Main Authors | , , |
| Format | Journal Article |
| Language | English |
| Published |
Elsevier Ltd
2015
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| Subjects | |
| Online Access | Get full text |
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| Abstract | An analytical approach describing the acoustic pressure field inside a thin layer of thermo-viscous fluid trapped between the square membrane or plate and planar backing electrode of the electrostatic receiver, which involves integral formulation, is presented. The use of integral formulation enables to choose between a model of membrane and plate easily and to avoid the limitations of the classical method whereby the acoustic field is expressed as a sum of eigenmodes coupled with modal expression of the diaphragm displacement. The analytically calculated pressure sensitivity of the receiver is compared to the numerically calculated one and the discrepancies are discussed. |
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| AbstractList | An analytical approach describing the acoustic pressure field inside a thin layer of thermo-viscous fluid trapped between the square membrane or plate and planar backing electrode of the electrostatic receiver, which involves integral formulation, is presented. The use of integral formulation enables to choose between a model of membrane and plate easily and to avoid the limitations of the classical method whereby the acoustic field is expressed as a sum of eigenmodes coupled with modal expression of the diaphragm displacement. The analytically calculated pressure sensitivity of the receiver is compared to the numerically calculated one and the discrepancies are discussed. |
| Author | Honzík, P. Guianvarc’h, C. Bruneau, M. |
| Author_xml | – sequence: 1 givenname: P. surname: Honzík fullname: Honzík, P. email: honzikp@fd.cvut.cz organization: Czech Technical University in Prague, Faculty of Transportation Sciences, Prague, Czech Republic – sequence: 2 givenname: C. surname: Guianvarc’h fullname: Guianvarc’h, C. organization: Laboratoire Commun de Métrologie LNE-Cnam, La Plaine Saint Denis, France – sequence: 3 givenname: M. surname: Bruneau fullname: Bruneau, M. organization: Laboratoire d’Acoustique de l’Université du Maine (LAUM, UMR CNRS 6613), Le Mans, France |
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| Keywords | MEMS microphones pressure sensitivity thermoviscous fluid integral method Thin-film damping |
| Language | English |
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| References | Le Van Suu, Durand, Bruneau (bib0025) 2010; 96 Honzík, Podkovskiy, Durand, Joly, Bruneau (bib0030) 2013; 134 Zuckerwar (bib0010) 1978; 64 Bruneau, Bruneau, Dupire (bib0020) 1995; 3 Kampinga, Wijnant, Boer (bib0055) 2010; 96 Sessler (bib0005) 1996; 44 Honzík, Bruneau (bib0040) 2015; 101 M. Bruneau, and T. Scelo (translator and contributor), Fundamentals of Acoustics (ISTE, London, 2006). Lavergne, Durand, Joly, Bruneau (bib0015) 2014; 100 Guianvarc’h, Gavioso, Benedetto, Pitre, Bruneau (bib0035) 2009; 80 Joly (bib0050) 2010; 96 Bruneau (10.1016/j.proeng.2015.08.656_bib0020) 1995; 3 Honzík (10.1016/j.proeng.2015.08.656_bib0040) 2015; 101 Joly (10.1016/j.proeng.2015.08.656_bib0050) 2010; 96 Kampinga (10.1016/j.proeng.2015.08.656_bib0055) 2010; 96 Zuckerwar (10.1016/j.proeng.2015.08.656_bib0010) 1978; 64 10.1016/j.proeng.2015.08.656_bib0045 Lavergne (10.1016/j.proeng.2015.08.656_bib0015) 2014; 100 Guianvarc’h (10.1016/j.proeng.2015.08.656_bib0035) 2009; 80 Sessler (10.1016/j.proeng.2015.08.656_bib0005) 1996; 44 Honzík (10.1016/j.proeng.2015.08.656_bib0030) 2013; 134 Le Van Suu (10.1016/j.proeng.2015.08.656_bib0025) 2010; 96 |
| References_xml | – volume: 100 start-page: 440 year: 2014 end-page: 447 ident: bib0015 article-title: Analytical Modeling of Electrostatic Transducers in Gases: Behavior of Their Membrane and Sensitivity publication-title: Acta Acust. united Ac. contributor: fullname: Bruneau – volume: 3 start-page: 275 year: 1995 end-page: 282 ident: bib0020 article-title: A Model for Rectangular Miniaturized Microphones publication-title: Acta Acustica contributor: fullname: Dupire – volume: 134 start-page: 3573 year: 2013 end-page: 3579 ident: bib0030 article-title: Analytical and numerical modeling of an axisymmetrical electrostatic transducer with interior geometrical discontinuity publication-title: J. Acoust. Soc. Am. contributor: fullname: Bruneau – volume: 80 start-page: 074901 year: 2009 ident: bib0035 article-title: Characterization of condenser microphones under different environmental conditions for accurate speed of sound measurements with acoustic resonators publication-title: Rev. 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Instrum. doi: 10.1063/1.3160295 contributor: fullname: Guianvarc’h – volume: 3 start-page: 275 year: 1995 ident: 10.1016/j.proeng.2015.08.656_bib0020 article-title: A Model for Rectangular Miniaturized Microphones publication-title: Acta Acustica contributor: fullname: Bruneau – volume: 96 start-page: 923 year: 2010 ident: 10.1016/j.proeng.2015.08.656_bib0025 article-title: On the modelling of clamped plates loaded by a squeeze fluid film: application to miniaturised sensors publication-title: Acta Acust. united Ac. doi: 10.3813/AAA.918351 contributor: fullname: Le Van Suu – volume: 96 start-page: 115 year: 2010 ident: 10.1016/j.proeng.2015.08.656_bib0055 article-title: Performance of several viscothermal acoustic finite elements publication-title: Acta Acust. united Ac. doi: 10.3813/AAA.918262 contributor: fullname: Kampinga – ident: 10.1016/j.proeng.2015.08.656_bib0045 doi: 10.1002/9780470612439 – volume: 134 start-page: 3573 year: 2013 ident: 10.1016/j.proeng.2015.08.656_bib0030 article-title: Analytical and numerical modeling of an axisymmetrical electrostatic transducer with interior geometrical discontinuity publication-title: J. 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| SubjectTerms | integral method MEMS microphones pressure sensitivity thermoviscous fluid Thin-film damping |
| Title | Modeling of Capacitive MEMS Microphone with Square Membrane or Plate Using Integral Method |
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