Modeling of Capacitive MEMS Microphone with Square Membrane or Plate Using Integral Method

An analytical approach describing the acoustic pressure field inside a thin layer of thermo-viscous fluid trapped between the square membrane or plate and planar backing electrode of the electrostatic receiver, which involves integral formulation, is presented. The use of integral formulation enable...

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Bibliographic Details
Published inProcedia engineering Vol. 120; pp. 418 - 421
Main Authors Honzík, P., Guianvarc’h, C., Bruneau, M.
Format Journal Article
LanguageEnglish
Published Elsevier Ltd 2015
Subjects
integral method
MEMS microphones
pressure sensitivity
thermoviscous fluid
Thin-film damping
MEMS microphones
pressure sensitivity
thermoviscous fluid
integral method
Thin-film damping
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Summary:An analytical approach describing the acoustic pressure field inside a thin layer of thermo-viscous fluid trapped between the square membrane or plate and planar backing electrode of the electrostatic receiver, which involves integral formulation, is presented. The use of integral formulation enables to choose between a model of membrane and plate easily and to avoid the limitations of the classical method whereby the acoustic field is expressed as a sum of eigenmodes coupled with modal expression of the diaphragm displacement. The analytically calculated pressure sensitivity of the receiver is compared to the numerically calculated one and the discrepancies are discussed.
ISSN:1877-7058
1877-7058
DOI:10.1016/j.proeng.2015.08.656