Model for thermoelastic actuation of an axisymmetric isotropic circular plate via an internal harmonic heat source

• Published in: International journal of solids and structures Vol. 48; no. 10; pp. 1466 - 1473
• Main Authors: Griffin, Benjamin A., Chandrasekaran, Venkataraman, Williams, Matthew D., Sankar, Bhavani V., Sheplak, Mark
• Format: Journal Article
• Language: English
• Published: Kidlington Elsevier Ltd 15.05.2011; Elsevier
• Subjects: Actuation; Analytical and numerical techniques; Axisymmetric; Computational efficiency; Exact sciences and technology; Fundamental areas of phenomenology (including applications); General equipment and techniques; Harmonics; Heat conduction; Heat sources; Heat transfer; Instruments, apparatus, components and techniques common to several branches of physics and astronomy; Low frequencies; Mathematical analysis; Mathematical models; MEMS; Physics; Plate; Proximity sensor; Solid mechanics; Static elasticity (thermoelasticity...); Structural and continuum mechanics; Thermoelastic; Transducers; Wave equations; Thermoelastic; MEMS; Proximity sensor; Plate; Wave equation; Internal source; Heat equation; Constraint; Bending wave; Elastic wave; Modeling; Optimization; Optimal design; Finite element method; Isotropic material; Microelectromechanical device; Actuator; Thermal conduction; Circular plate; Micromachining; Thermomechanical properties; Green function; Axial symmetry; Heat source; Proximity detector; Thermoelasticity; Distance measurement; Heat transfer
• ISSN: 0020-7683; 1879-2146
• DOI: 10.1016/j.ijsolstr.2011.01.029

This paper presents a reduced analytical modeling method for the initial optimal design of thermoelastic micromachined actuators. The key aspects of the model are a Green’s function formulation of the axisymmetric heat conduction equation that incorporates an internal heat source and the solution of the thermoelastically forced bending wave equation. Model results of a representative thermoelastic structure include transient temperature and sinusoidal steady state transverse displacement. Comparison with finite element analysis shows excellent agreement with favorable computational costs. Model constraints at low frequencies are identified and discussed. The computational efficiency of the analytical model makes it a more viable modeling method for design optimization.