Calibration stability of scanning electron microscopes

The medium-term storage stability and reproducibility defined in the course of calibration of the scale factor of scanning electron microscopes are established with the use of an MShPS-2.0K measure. Conclusions are drawn to the effect that the dependence of the scale factor on the working distance m...

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Bibliographic Details
Published inMeasurement techniques Vol. 56; no. 6; pp. 630 - 634
Main Authors Zablotskii, A. V., Al’zoba, V. V., Morozov, S. A., Todua, P. A.
Format Journal Article
LanguageEnglish
Published Boston Springer US 01.09.2013
Springer
Springer Nature B.V
Subjects
Accuracy
Analytical Chemistry
Calibration
Characterization and Evaluation of Materials
Dependence
Dimensional measurements
Electron microscopes
Experiments
Measurement Science and Instrumentation
Measurement techniques
Microscopes
Physical Chemistry
Physics
Physics and Astronomy
Reproducibility
Scanning electron microscopy
Scatter
Stability
Storage stability
Studies
United States > US
scanning electron microscope
calibration
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Summary:The medium-term storage stability and reproducibility defined in the course of calibration of the scale factor of scanning electron microscopes are established with the use of an MShPS-2.0K measure. Conclusions are drawn to the effect that the dependence of the scale factor on the working distance may lead to some scatter of the measurement results and that direct comparison of the dimensions of the measured subject and a reference object obtained with the same parameters of the microscope is required to increase the measurement accuracy.
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ISSN:0543-1972
1573-8906
DOI:10.1007/s11018-013-0257-3