Characterization of NbTiN Thin Films Deposited on Various Substrates

• Published in: IEEE transactions on applied superconductivity Vol. 21; no. 3; pp. 139 - 142
• Main Authors: Makise, K, Terai, H, Takeda, M, Uzawa, Y, Zhen Wang
• Format: Journal Article Conference Proceeding
• Language: English
• Published: New York, NY IEEE 01.06.2011; Institute of Electrical and Electronics Engineers; The Institute of Electrical and Electronics Engineers, Inc. (IEEE)
• Subjects: Aluminum; Applied sciences; Chemicals; Conductivity; Crystal structure; Deposition; Electrical engineering. Electrical power engineering; Electromagnets; Electronics; Exact sciences and technology; Fused quartz; Grain size; Lattices; Magnesium oxide; Microelectronic fabrication (materials and surfaces technology); Niobium nitride; niobium titanium nitride; Optimization; Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices; Substrates; Superconducting devices; Superconductivity; Thin films; transport properties; Various equipment and components; Transport properties; niobium titanium nitride; Resistivity; Chemical structure; Titanium nitride; Lattice parameters; Sputtering; Sputter coating; Thin film; thin films; Crystalline material; Microelectronic fabrication; Niobium nitride; Chemical composition; Low k dielectric; High temperature superconductor
• ISSN: 1051-8223; 1558-2515
• DOI: 10.1109/TASC.2010.2088350

Niobium titanium nitride (NbTiN) thin films were deposited on a selection of different substrates to explore the optimum depositing condition of high-quality NbTiN thin films. The NbTiN films deposited on MgO, Al 2 O 3 , and fused quartz substrates showed excellent superconducting properties with a high T C of 14.7 K, 14.5 K, 15.2 K, and low resistivity ρ 20 K of 55 μΩcm, 116 μΩcm, 78 μΩcm, respectively. The chemical composition, crystal structure, and relationship between superconducting properties and crystal structure were systematically investigated by changing the N 2 /(Ar+N 2 ) ratio in sputtering gases. The lattice parameter systematically changed as N 2 /(Ar+N 2 ) ratio was varied. We found that the superconducting properties depend on the lattice parameter, and the film with the best superconducting properties had a lattice parameter of 4.380 Å (on MgO), 4.345 Å (on Al 2 O 3 ), 4.335 Å (on fused quartz).