Magnetron Deposition of Barium Hexaferrite Films from a Target of Stoichiometric Composition

A technique is proposed for obtaining films of barium hexaferrite on sapphire with (0001) orientation by high-frequency magnetron sputtering of a stoichiometric BaFe 12 O 19 target followed by annealing. The X-ray diffraction analysis and Raman spectrometry carried out showed the possibility of crys...

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Bibliographic Details
Published inJournal of communications technology & electronics Vol. 68; no. 9; pp. 1006 - 1008
Main Author Luzanov, V. A.
Format Journal Article
LanguageEnglish
Published Moscow Pleiades Publishing 01.09.2023
Springer
Springer Nature B.V
Subjects
Annealing
Barium
Barium hexaferrite
Communications Engineering
Composition
Crystallization
Engineering
Magnetron sputtering
Networks
ON THE 70th ANNIVERSARY OF THE INSTITUTE OF RADIOENGINEERING AND ELECTRONICS
RUSSIAN ACADEMY OF SCIENCES
Sapphire
Stoichiometry
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Summary:A technique is proposed for obtaining films of barium hexaferrite on sapphire with (0001) orientation by high-frequency magnetron sputtering of a stoichiometric BaFe 12 O 19 target followed by annealing. The X-ray diffraction analysis and Raman spectrometry carried out showed the possibility of crystallization of oriented films without using correction of the target composition.
ISSN:1064-2269
1555-6557
DOI:10.1134/S1064226923090176