Subsurface damage from helium ions as a function of dose, beam energy, and dose rate
In recent years, helium ion microscopy has produced high resolution images with novel contrast mechanisms. However, when using any charged particle beam, one must consider the potential for sample damage. In this article, the authors will consider helium ion induced damage thresholds as compared to...
Saved in:
| Published in | Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena Vol. 27; no. 6; pp. 3244 - 3249 |
|---|---|
| Main Authors | , , , , |
| Format | Journal Article |
| Language | English |
| Published |
American Vacuum Society
01.11.2009
|
| Subjects | |
| Online Access | Get full text |
Cover
Loading…
| Abstract | In recent years, helium ion microscopy has produced high resolution images with novel contrast mechanisms. However, when using any charged particle beam, one must consider the potential for sample damage. In this article, the authors will consider helium ion induced damage thresholds as compared to other more traditional charged-particle-beam technologies, as a function of dose, dose rate, and beam energy, and describe potential applications operating regimes. |
|---|---|
| AbstractList | In recent years, helium ion microscopy has produced high resolution images with novel contrast mechanisms. However, when using any charged particle beam, one must consider the potential for sample damage. In this article, the authors will consider helium ion induced damage thresholds as compared to other more traditional charged-particle-beam technologies, as a function of dose, dose rate, and beam energy, and describe potential applications operating regimes. |
| Author | Greenzweig, Yuval Livengood, Richard Notte, John McVey, Shawn Tan, Shida |
| Author_xml | – sequence: 1 givenname: Richard surname: Livengood fullname: Livengood, Richard organization: Intel Corporation, MS: SC9-68, Santa Clara, California 95054-1549 – sequence: 2 givenname: Shida surname: Tan fullname: Tan, Shida email: shida.tan@intel.com organization: Intel Corporation, MS: SC9-68, Santa Clara, California 95054-1549 – sequence: 3 givenname: Yuval surname: Greenzweig fullname: Greenzweig, Yuval organization: Intel Corporation, MS: SC9-68, Santa Clara, California 95054-1549 – sequence: 4 givenname: John surname: Notte fullname: Notte, John organization: Carl Zeiss SMT, 1 Corporation Way, Peabody, Massachusetts 01960 – sequence: 5 givenname: Shawn surname: McVey fullname: McVey, Shawn organization: Carl Zeiss SMT, 1 Corporation Way, Peabody, Massachusetts 01960 |
| BookMark | eNqNkF1LwzAUhoNMcJte-A9yq6xbTrKm7Y0gwy8YeOG8DmlzMitrM5JW2L9f5yYDUREOnA-e94XzDkivdjUScglsDAByAmPBRQIMTkgfYs6iNJZJr5tZAhEwLs7IIIR3xpiMheiTxUubh9ZbXSA1utJLpNa7ir7hqmwrWro6UN0VtW1dNN1KnaXGBRzRHHVFsUa_3Iyors3nmXrd4Dk5tXoV8OLQh-T1_m4xe4zmzw9Ps9t5VEw5a6I0ZcBTafJUMB1jZoupQcGzHKXVeQJcS7SxtSbnseAmwYwnJgMmDC8ktyiG5GrvW3gXgker1r6stN8oYGoXhwJ1iKNjJ9_Yomz07qPG63L1o-Jmrwhf5O_2xxTVPkVlfWdw_W-Dv-AP54-gWhsrtm_qlJA |
| CODEN | JVTBD9 |
| CitedBy_id | crossref_primary_10_1016_j_mee_2013_09_018 crossref_primary_10_1063_1_5092221 crossref_primary_10_1088_0957_4484_25_48_485704 crossref_primary_10_1021_acsnano_6b02489 crossref_primary_10_1088_0963_0252_25_2_025021 crossref_primary_10_1002_sca_21009 crossref_primary_10_1088_1361_6668_ab2d52 crossref_primary_10_3762_bjnano_4_53 crossref_primary_10_1088_1361_6528_ab90b5 crossref_primary_10_1116_1_4972050 crossref_primary_10_1116_1_4758768 crossref_primary_10_1080_02678292_2018_1471747 crossref_primary_10_1364_OME_5_000176 crossref_primary_10_1088_0957_4484_23_39_395302 crossref_primary_10_1007_s00339_014_8763_y crossref_primary_10_3762_bjnano_9_267 crossref_primary_10_1016_j_ccr_2024_215816 crossref_primary_10_1557_jmr_2013_30 crossref_primary_10_1017_S1551929512000715 crossref_primary_10_1063_5_0162597 crossref_primary_10_1038_s41467_018_03316_7 crossref_primary_10_1021_acsnano_1c00587 crossref_primary_10_1109_TASC_2020_3018545 crossref_primary_10_1021_acsphotonics_0c01907 crossref_primary_10_1021_acsami_8b13085 crossref_primary_10_1088_1361_6528_aabe22 crossref_primary_10_1116_1_3511509 crossref_primary_10_1109_TASC_2021_3053208 crossref_primary_10_1002_smll_201601753 crossref_primary_10_1002_sca_20290 crossref_primary_10_1088_0957_4484_26_25_255303 crossref_primary_10_1557_mrs_2014_52 crossref_primary_10_1039_D1TC00431J crossref_primary_10_1557_mrs_2014_56 crossref_primary_10_1038_s43246_022_00240_8 crossref_primary_10_1021_acs_nanolett_8b01282 crossref_primary_10_1380_vss_64_424 crossref_primary_10_3762_bjnano_7_28 crossref_primary_10_1016_j_ultramic_2015_12_005 crossref_primary_10_1116_1_5096908 crossref_primary_10_1088_1361_6528_aa564d crossref_primary_10_1016_j_apsusc_2019_06_024 crossref_primary_10_1021_acs_nanolett_6b04729 crossref_primary_10_1116_1_4977566 crossref_primary_10_3762_bjnano_11_111 crossref_primary_10_1002_smll_201903025 crossref_primary_10_1021_acs_jpcc_2c03707 crossref_primary_10_1088_1361_6528_abb5cf crossref_primary_10_3762_bjnano_3_67 crossref_primary_10_1021_acsaelm_0c00627 crossref_primary_10_1016_j_mee_2016_02_045 crossref_primary_10_1063_1_4932038 crossref_primary_10_1364_OE_471884 crossref_primary_10_1039_C8NR08224C crossref_primary_10_1103_PhysRevMaterials_5_024404 crossref_primary_10_1016_j_carbon_2020_12_076 crossref_primary_10_1016_j_nima_2010_12_220 crossref_primary_10_1557_opl_2012_1347 crossref_primary_10_1021_acsami_9b21414 crossref_primary_10_1016_j_radphyschem_2021_109832 crossref_primary_10_1116_1_4981016 crossref_primary_10_1021_acsami_6b09758 crossref_primary_10_1557_opl_2011_1407 crossref_primary_10_1038_s41598_019_55628_3 crossref_primary_10_1109_TCI_2023_3282042 crossref_primary_10_1116_6_0004100 crossref_primary_10_1021_acsami_4c03362 crossref_primary_10_1364_OPTCON_447415 crossref_primary_10_1093_mam_ozaf001 crossref_primary_10_1016_j_vacuum_2018_03_029 crossref_primary_10_1103_PhysRevLett_114_256801 crossref_primary_10_3762_bjnano_7_104 crossref_primary_10_1021_acsami_0c13565 crossref_primary_10_1088_1361_6528_aae183 crossref_primary_10_1088_2631_7990_abc673 crossref_primary_10_1063_5_0099200 crossref_primary_10_1116_1_4963896 crossref_primary_10_1116_1_3660797 crossref_primary_10_1021_acs_nanolett_5b04815 crossref_primary_10_1088_1361_6528_28_4_045305 crossref_primary_10_1557_adv_2018_33 crossref_primary_10_1116_1_4868027 crossref_primary_10_1063_1_5143026 crossref_primary_10_1063_1_5143421 crossref_primary_10_1016_j_apsusc_2013_06_088 crossref_primary_10_1088_1361_6528_ab0506 crossref_primary_10_1016_j_sna_2021_112802 crossref_primary_10_1103_PhysRevApplied_22_054026 crossref_primary_10_1021_acs_nanolett_9b01911 crossref_primary_10_1116_1_4905091 crossref_primary_10_1021_acsami_6b06621 crossref_primary_10_1016_j_mtphys_2021_100379 crossref_primary_10_1116_1_4766882 crossref_primary_10_1016_j_mssp_2023_108104 crossref_primary_10_1116_1_4800983 crossref_primary_10_1063_1_5096596 crossref_primary_10_1109_TASC_2024_3350600 crossref_primary_10_3762_bjnano_12_52 crossref_primary_10_1155_2014_170415 crossref_primary_10_1002_smll_201503680 crossref_primary_10_1109_TCI_2021_3076887 crossref_primary_10_1063_5_0154152 crossref_primary_10_1103_PhysRevB_98_134109 crossref_primary_10_3762_bjnano_3_57 crossref_primary_10_1103_PhysRevMaterials_3_053801 crossref_primary_10_1038_s41598_020_68955_7 crossref_primary_10_1039_C9NA00390H crossref_primary_10_1002_adem_202201707 crossref_primary_10_1002_adom_202302083 crossref_primary_10_1016_j_mee_2021_111621 crossref_primary_10_1039_C9RA01447K crossref_primary_10_7736_KSPE_2018_35_3_241 crossref_primary_10_1016_j_ultramic_2020_112948 crossref_primary_10_1021_acsami_8b18083 crossref_primary_10_1021_acs_langmuir_0c00923 crossref_primary_10_1088_0953_8984_26_16_165401 crossref_primary_10_1038_s41598_023_33839_z crossref_primary_10_1139_cjp_2014_0403 crossref_primary_10_1146_annurev_anchem_061318_115457 crossref_primary_10_1038_s41598_022_06960_8 crossref_primary_10_1088_1361_6528_ab4a65 crossref_primary_10_1063_1_5036941 crossref_primary_10_1088_1361_6528_abafd6 crossref_primary_10_1017_S1431927617000502 crossref_primary_10_1002_smtd_202301364 crossref_primary_10_1063_1_4739240 crossref_primary_10_1002_smll_202205680 crossref_primary_10_1088_1741_4326_adbcc5 crossref_primary_10_3390_nano12193269 crossref_primary_10_1016_j_ultramic_2020_112952 crossref_primary_10_1021_acsami_1c09295 crossref_primary_10_3390_s20082306 crossref_primary_10_1038_s41598_021_82860_7 crossref_primary_10_1116_6_0001838 crossref_primary_10_1063_1_4947277 crossref_primary_10_1016_j_apsusc_2020_147922 crossref_primary_10_1116_1_4732074 crossref_primary_10_1016_j_ultramic_2018_12_014 crossref_primary_10_1116_1_5034131 crossref_primary_10_1116_1_5001927 crossref_primary_10_1088_0022_3727_46_19_195501 crossref_primary_10_1116_1_4863676 crossref_primary_10_1039_D2NR03649E crossref_primary_10_1116_6_0002643 crossref_primary_10_1016_j_actamat_2016_02_015 crossref_primary_10_1116_1_5020667 crossref_primary_10_1116_1_4900728 crossref_primary_10_1017_S1431927615010673 crossref_primary_10_1088_0957_4484_26_5_050501 crossref_primary_10_1002_adfm_201400553 crossref_primary_10_1116_1_4994801 crossref_primary_10_1038_srep26491 crossref_primary_10_1016_j_nanoen_2020_105451 crossref_primary_10_1002_smtd_201600060 crossref_primary_10_1016_j_jlumin_2014_09_016 |
| Cites_doi | 10.1103/PhysRevB.55.5037 10.1134/1.1538730 10.1016/j.phpro.2008.07.089 |
| ContentType | Journal Article |
| Copyright | American Vacuum Society 2009 American Vacuum Society |
| Copyright_xml | – notice: American Vacuum Society – notice: 2009 American Vacuum Society |
| DBID | AAYXX CITATION |
| DOI | 10.1116/1.3237101 |
| DatabaseName | CrossRef |
| DatabaseTitle | CrossRef |
| DatabaseTitleList | CrossRef |
| DeliveryMethod | fulltext_linktorsrc |
| Discipline | Engineering Physics |
| EISSN | 1520-8567 |
| EndPage | 3249 |
| ExternalDocumentID | 10_1116_1_3237101 |
| GroupedDBID | .DC 29L 5-Q 5GY AAAAW AAEUA ABFTF ABJNI ACBRY ADLOM AENEX AGTJO AI. ALMA_UNASSIGNED_HOLDINGS ARCSS BAUXJ H~9 M43 M71 M73 RAW RIP RNS ROL RQS VAS VH1 WH7 XFK AAYXX ADMLS CITATION |
| ID | FETCH-LOGICAL-c420t-8801286db830a5e9fc4de329be6fab712a6ef5ffdb2532d7e927d9103d2c62fe3 |
| ISSN | 1071-1023 |
| IngestDate | Tue Jul 01 04:29:23 EDT 2025 Thu Apr 24 23:11:15 EDT 2025 Fri Jun 21 00:19:50 EDT 2024 Fri Jun 21 00:16:44 EDT 2024 Sun Jul 14 10:05:11 EDT 2019 |
| IsPeerReviewed | true |
| IsScholarly | true |
| Issue | 6 |
| Keywords | Helium Ion Gallium Implant Damage Sub-surface damage Focused Ion Beam Helium Helium Ion Microscope Silicon dislocations FIB |
| Language | English |
| License | 1071-1023/2009/27(6)/3244/6/$25.00 |
| LinkModel | OpenURL |
| MergedId | FETCHMERGED-LOGICAL-c420t-8801286db830a5e9fc4de329be6fab712a6ef5ffdb2532d7e927d9103d2c62fe3 |
| PageCount | 6 |
| ParticipantIDs | scitation_primary_10_1116_1_3237101 crossref_primary_10_1116_1_3237101 crossref_citationtrail_10_1116_1_3237101 scitation_primary_10_1116_1_3237101Subsurface_damage_fr |
| ProviderPackageCode | CITATION AAYXX |
| PublicationCentury | 2000 |
| PublicationDate | 2009-11-01 |
| PublicationDateYYYYMMDD | 2009-11-01 |
| PublicationDate_xml | – month: 11 year: 2009 text: 2009-11-01 day: 01 |
| PublicationDecade | 2000 |
| PublicationTitle | Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena |
| PublicationYear | 2009 |
| Publisher | American Vacuum Society |
| Publisher_xml | – name: American Vacuum Society |
| References | Livengood, Grumski, Greenzweig, Liang, Jamison, Xie (c5) 2008; 1 Reutov, Sokhatskii (c6) 2003; 48 Paccagnella, Cester, Cellere (c3); 2004 Estreicher, Weber, Derecskei-Kovacs, Marynick (c7) 1997; 55 Reutov, V.; Sokhatskii, A. 2003; 48 Estreicher, D.; Weber, J.; Derecskei-Kovacs, A.; Marynick, D. 1997; 55 Livengood, R.; Grumski, M.; Greenzweig, Y.; Liang, T.; Jamison, R.; Xie, Q. 2008; 1 Paccagnella, A.; Cester, A.; Cellere, G.; 2004 (2023071607184975200_c6) 2003; 48 (2023071607184975200_c2) 2006 (2023071607184975200_c7) 1997; 55 (2023071607184975200_c1) 2006 (2023071607184975200_c3); 2004 (2023071607184975200_c4) 1984 (2023071607184975200_c5) 2008; 1 |
| References_xml | – volume: 48 start-page: 73 issn: 1063-7842 year: 2003 ident: c6 publication-title: Tech. Phys. – volume: 2004 start-page: 473 issn: 0163-1918 ident: c3 publication-title: Tech. Dig. - Int. Electron Devices Meet. – volume: 1 start-page: 143 issn: 1875-3892 year: 2008 ident: c5 publication-title: Phys. Procedia – volume: 55 start-page: 5037 issn: 0163-1829 year: 1997 ident: c7 publication-title: Phys. Rev. B – volume: 55 start-page: 5037 year: 1997 publication-title: Phys. Rev. B doi: 10.1103/PhysRevB.55.5037 – volume: 48 start-page: 73 year: 2003 publication-title: Tech. Phys. doi: 10.1134/1.1538730 – volume: 2004 start-page: 473 publication-title: Tech. Dig. - Int. Electron Devices Meet. – volume: 1 start-page: 143 year: 2008 publication-title: Phys. Procedia doi: 10.1016/j.phpro.2008.07.089 – start-page: 24 year: 2006 ident: 2023071607184975200_c2 – volume: 55 start-page: 5037 year: 1997 ident: 2023071607184975200_c7 publication-title: Phys. Rev. B doi: 10.1103/PhysRevB.55.5037 – start-page: 2871 volume-title: J. Vac. Sci. Technol. B year: 2006 ident: 2023071607184975200_c1 – volume: 1 start-page: 143 year: 2008 ident: 2023071607184975200_c5 publication-title: Phys. Procedia doi: 10.1016/j.phpro.2008.07.089 – volume-title: The Stopping and Range of Ions in Solids year: 1984 ident: 2023071607184975200_c4 – volume: 2004 start-page: 473 ident: 2023071607184975200_c3 publication-title: Tech. Dig. - Int. Electron Devices Meet. – volume: 48 start-page: 73 year: 2003 ident: 2023071607184975200_c6 publication-title: Tech. Phys. doi: 10.1134/1.1538730 |
| SSID | ssj0006533 |
| Score | 2.3841314 |
| Snippet | In recent years, helium ion microscopy has produced high resolution images with novel contrast mechanisms. However, when using any charged particle beam, one... |
| SourceID | crossref scitation |
| SourceType | Enrichment Source Index Database Publisher |
| StartPage | 3244 |
| Title | Subsurface damage from helium ions as a function of dose, beam energy, and dose rate |
| URI | http://dx.doi.org/10.1116/1.3237101 |
| Volume | 27 |
| hasFullText | 1 |
| inHoldings | 1 |
| isFullTextHit | |
| isPrint | |
| link | http://utb.summon.serialssolutions.com/2.0.0/link/0/eLvHCXMwnV3fb9MwELaqTQh4QDBAjAGygAekLF3rNE7yOH5pQtte6NB4iuzEppXWpOqSIu1P5K_inLOTTOrQmBRFbWpbre_z-e763ZmQ9zJUMuGx9HWswEGJhPZllIU-gAk0A6x0pk1y8skpPzqbfDsPzweDPz3WUl3JYXa1Ma_kLlKFZyBXkyX7H5JtB4UH8BrkC3eQMNxvJWOz6uuVFrA2c7Ew7JsmW2SmLub1wmsobgIuz2xezjLM7VGKUomFp5rMP8fgNB95pnTEDRbrWmQ1jOsygQxoqjYyP_Q-Whr-quzO1sEK0IUoyoXh3XhYrrYGH99bYoqCPVNl0cUqsXbBTJk-RbtrHBu1_MsRhLpyABh2wCjubN7FFxpC0dVvNW-G_1mvRcslOS2rSl3jIbuwR2Lz_1qguv-zfuBPtxzXniYH28k3dSlwo7PaHXzlOMTzP5z6x9IEFuZ9XQ6m5qRnF8Db5IY9pwl_DAMWgLkGnvg2A5cFdO724eeT4--tXcDBskYGLH4xW-cKuh-0na9ZR_dBnsjH6Jk808fkkZU8PUTgPSEDVeyQh70KljvkXsMgzi6fkmkHRopgpAaMFMFIDRipgIs6MNJSU4O4fWqgSBGK-xSE3zymBojPyNnXL9NPR749ssPPJmxU-XFj8PBcxsFIhCrR2SRXAUuk4lrIaMwEVzrUOpcsDFgeqYRFOVisQc4yzrQKnpOtoizUC0JlyASoETbOOHixQorRKBMhA03CpRAq2iUf3FSlbp7MsSoXKfq1PB2ndlZ3ydu26RKLuGxq9K6d73-1im7RqpvxFGc81auN46_LVdcrXeb65Z3H3yMPunXyimzBelavwWCu5BuLxL98Wsd1 |
| linkProvider | EBSCOhost |
| openUrl | ctx_ver=Z39.88-2004&ctx_enc=info%3Aofi%2Fenc%3AUTF-8&rfr_id=info%3Asid%2Fsummon.serialssolutions.com&rft_val_fmt=info%3Aofi%2Ffmt%3Akev%3Amtx%3Ajournal&rft.genre=article&rft.atitle=Subsurface+damage+from+helium+ions+as+a+function+of+dose%2C+beam+energy%2C+and+dose+rate&rft.jtitle=Journal+of+vacuum+science+%26+technology.+B%2C+Microelectronics+and+nanometer+structures+processing%2C+measurement+and+phenomena&rft.au=Livengood%2C+Richard&rft.au=Tan%2C+Shida&rft.au=Greenzweig%2C+Yuval&rft.au=Notte%2C+John&rft.date=2009-11-01&rft.pub=American+Vacuum+Society&rft.issn=1071-1023&rft.eissn=1520-8567&rft.volume=27&rft.issue=6&rft.spage=3244&rft.epage=3249&rft_id=info:doi/10.1116%2F1.3237101 |
| thumbnail_l | http://covers-cdn.summon.serialssolutions.com/index.aspx?isbn=/lc.gif&issn=1071-1023&client=summon |
| thumbnail_m | http://covers-cdn.summon.serialssolutions.com/index.aspx?isbn=/mc.gif&issn=1071-1023&client=summon |
| thumbnail_s | http://covers-cdn.summon.serialssolutions.com/index.aspx?isbn=/sc.gif&issn=1071-1023&client=summon |