APA (7th ed.) Citation

Livengood, R., Tan, S., Greenzweig, Y., Notte, J., & McVey, S. (2009). Subsurface damage from helium ions as a function of dose, beam energy, and dose rate. Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 27(6), 3244-3249. https://doi.org/10.1116/1.3237101

Chicago Style (17th ed.) Citation

Livengood, Richard, Shida Tan, Yuval Greenzweig, John Notte, and Shawn McVey. "Subsurface Damage from Helium Ions as a Function of Dose, Beam Energy, and Dose Rate." Journal of Vacuum Science & Technology. B, Microelectronics and Nanometer Structures Processing, Measurement and Phenomena 27, no. 6 (2009): 3244-3249. https://doi.org/10.1116/1.3237101.

MLA (9th ed.) Citation

Livengood, Richard, et al. "Subsurface Damage from Helium Ions as a Function of Dose, Beam Energy, and Dose Rate." Journal of Vacuum Science & Technology. B, Microelectronics and Nanometer Structures Processing, Measurement and Phenomena, vol. 27, no. 6, 2009, pp. 3244-3249, https://doi.org/10.1116/1.3237101.