Parallel Patterning of Mesoscopic Ring Arrays Using Nanochannel Glass Replica Masks

Dense arrays of hollow mesoscopic ring structureshave been produced using nanochannel glass replica mask technology. The Figure shows Au rings on a Cr‐coated Si substrate. The mask is used initially to deposit the gold dots. An Mo layer is then deposited at a glancing angle, which reduces the hole s...

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Bibliographic Details
Published inAdvanced materials (Weinheim) Vol. 11; no. 9; pp. 769 - 773
Main Authors Pearson, Douglas H., Tonucci, Ronald J., Bussmann, Konrad M., Bolden, Elizabeth A.
Format Journal Article
LanguageEnglish
Published Weinheim WILEY-VCH Verlag GmbH 01.06.1999
WILEY‐VCH Verlag GmbH
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Summary:Dense arrays of hollow mesoscopic ring structureshave been produced using nanochannel glass replica mask technology. The Figure shows Au rings on a Cr‐coated Si substrate. The mask is used initially to deposit the gold dots. An Mo layer is then deposited at a glancing angle, which reduces the hole size, and the center portions of the dots are then milled away to leave the rings.
Bibliography:ark:/67375/WNG-LT6DW2B7-M
ArticleID:ADMA769
istex:3E9DB27ECBFBE29A6DABEF90E29C3605A485D8E0
ISSN:0935-9648
1521-4095
DOI:10.1002/(SICI)1521-4095(199906)11:9<769::AID-ADMA769>3.0.CO;2-I