APA (7th ed.) Citation

Wei, X., Wu, A. M., Chen, M., Chen, J., Zhang, M., Wang, X., & Lin, C. L. (2008). Fabrication of thin-film silicon on insulator by separation by implanted oxygen layer transfer. Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 26(6), L45-L47. https://doi.org/10.1116/1.2990785

Chicago Style (17th ed.) Citation

Wei, Xing, Ai Min Wu, Meng Chen, Jing Chen, Miao Zhang, Xi Wang, and Cheng Lu Lin. "Fabrication of Thin-film Silicon on Insulator by Separation by Implanted Oxygen Layer Transfer." Journal of Vacuum Science & Technology. B, Microelectronics and Nanometer Structures Processing, Measurement and Phenomena 26, no. 6 (2008): L45-L47. https://doi.org/10.1116/1.2990785.

MLA (9th ed.) Citation

Wei, Xing, et al. "Fabrication of Thin-film Silicon on Insulator by Separation by Implanted Oxygen Layer Transfer." Journal of Vacuum Science & Technology. B, Microelectronics and Nanometer Structures Processing, Measurement and Phenomena, vol. 26, no. 6, 2008, pp. L45-L47, https://doi.org/10.1116/1.2990785.