Ballistic-Electron-Emission Microscopy on Epitaxial Silicides
Ballistic-electron-emission microscopy (BEEM) and spectroscopy (BEES) applied to epitaxial CoSi 2 /Si interfaces are reviewed. Interfacial dislocations in 2–3-nm-thick CoSi 2 (001)/Si(001) films with Burgers vector b = a /4 lower the barrier height by almost 0.1 eV at 77 K. This corresponds to a dec...
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Published in | Japanese Journal of Applied Physics Vol. 37; no. 6S; p. 3800 |
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Main Authors | , , |
Format | Journal Article |
Language | English |
Published |
01.06.1998
|
Online Access | Get full text |
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Summary: | Ballistic-electron-emission microscopy (BEEM) and
spectroscopy (BEES) applied to epitaxial CoSi
2
/Si interfaces are reviewed.
Interfacial dislocations in 2–3-nm-thick CoSi
2
(001)/Si(001)
films with Burgers vector
b
=
a
/4
lower the barrier height by almost 0.1 eV at 77 K.
This corresponds to a
decrease in the Schottky barrier height Φ
B
at the metallurgical
interface from Φ
B
=0.74±0.03 eV, characteristic of defect-free
regions, to near zero within the range of the strain field of a few
nanometers. In contrast, the dislocations of type
b
=
a
/6
present at CoSi
2
/Si(111) interfaces do not affect
the barrier height. CoSi
2
/Si(111) films are more suitable for studying
interfacial scattering by BEEM than CoSi
2
/Si(100) films, because of their
simpler surface structure and because of band structure effects.
Here, individual point defects can be
resolved. Their spatial distribution indicates diffusion along the interface
during film growth. By analysing the shape of BEES spectra obtained on
isolated point defects, and by making use of the projected band structure
predicting the BEES current to set in ∼0.2 eV above the Schottky
barrier, it may be concluded that the defects are located at the interface. |
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ISSN: | 0021-4922 1347-4065 |
DOI: | 10.1143/JJAP.37.3800 |