Laser Interferometric Displacement Measurements of Multi-Layer Actuators and PZT Ceramics

• Published in: Ferroelectrics Vol. 320; no. 1; pp. 161 - 169
• Main Authors: Burianova, L., Bowen, C. R., Prokopova, M., Sulc, M.
• Format: Journal Article Conference Proceeding
• Language: English
• Published: London Taylor & Francis Group 01.07.2005; Taylor and Francis
• Subjects: 42.87; 77.65; 77.84.D; Exact sciences and technology; General equipment and techniques; Instruments, apparatus, components and techniques common to several branches of physics and astronomy; Laser interferometry; Multi-layer actuator; Physics; Piezoelectric coefficient; PZT ceramics; Transducers; Lead titanates; PZT; Lead zirconates; Finite element method; 77.84.D; 77.65; 42.87; Laser interferometer; Multilayers; Piezoelectric materials; Electric field effects; PZT ceramics; Multi-layer actuator; Piezoelectric coefficient; Laser interferometry; Piezoelectric actuators; Displacement measurement; Piezoelectricity
• ISSN: 0015-0193; 1563-5112
• DOI: 10.1080/00150190590967026

This paper deals with the characterization of multi-layer actuators and bulk PZT ceramics under the influence of an applied electric field. The displacement profile of materials and devices with evaporated reflective dielectric layers was measured using a double-beam laser interferometer at room temperature. The displacements of 3 mm thick plates of bulk soft PZT were characterized to determine bulk material properties. The tested multi-layer actuator devices consisted of 20 layers, with each layer being 87 micrometers thick. The results of "point to point scanning" of displacement across piezoelectric materials are presented and the effective actuation area of the actuator displacement is determined. Comparisons are made of the behaviour of the bulk ceramics and the actuator. In addition to experimental measurement, representative coupled-field finite element model was constructed to compare with experimental x−y displacement data of multi-layer actuator.