In situ focus characterization by ablation technique to enable optics alignment at an XUV FEL source

In situ focus characterization is demonstrated by working at an extreme ultraviolet (XUV) free-electron laser source using ablation technique. Design of the instrument reported here allows reaching a few micrometres resolution along with keeping the ultrahigh vacuum conditions and ensures high-contr...

Full description

Saved in:
Bibliographic Details
Published inReview of scientific instruments Vol. 84; no. 6; p. 065104
Main Authors Gerasimova, N, Dziarzhytski, S, Weigelt, H, Chalupský, J, Hájková, V, Vyšín, L, Juha, L
Format Journal Article
LanguageEnglish
Published United States 01.06.2013
Online AccessGet more information

Cover

More Information
Summary:In situ focus characterization is demonstrated by working at an extreme ultraviolet (XUV) free-electron laser source using ablation technique. Design of the instrument reported here allows reaching a few micrometres resolution along with keeping the ultrahigh vacuum conditions and ensures high-contrast visibility of ablative imprints on optically transparent samples, e.g., PMMA. This enables on-line monitoring of the beam profile changes and thus makes possible in situ alignment of the XUV focusing optics. A good agreement between focal characterizations retrieved from in situ inspection of ablative imprints contours and from well-established accurate ex situ analysis with Nomarski microscope has been observed for a typical micro-focus experiment.
ISSN:1089-7623
DOI:10.1063/1.4807896