A kinematic model describing particle movement near a surface as effected by Brownian motion and electrostatic and Van der Waals forces

Nanoparticle movement near a surface is greatly influenced by electrostatic and Van der Waals forces between the particle and the surface, as well as by Brownian motion. In this paper, several precise equations are derived to describe the Van der Waals and electrostatic forces between a particle and...

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Bibliographic Details
Published inScience China. Technological sciences Vol. 57; no. 11; pp. 2144 - 2152
Main Authors Mei, HeGeng, Zhao, DeWen, Wang, TongQin, Cheng, Jie, Lu, XinChun
Format Journal Article
LanguageEnglish
Published Heidelberg Science China Press 01.11.2014
Subjects
Brownian motion
Displacement
Electrostatics
Engineering
Kinematics
Mathematical analysis
Mathematical models
Movement
Van der Waals forces
布朗运动
模型描述
粒子运动
范德华力
表面
运动学
静电力
颗粒运动
Brownian motion
electrostatic force
kinematic model
zeta potential
post-CMP cleaning
distribution
Van der Waals force
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Summary:Nanoparticle movement near a surface is greatly influenced by electrostatic and Van der Waals forces between the particle and the surface, as well as by Brownian motion. In this paper, several precise equations are derived to describe the Van der Waals and electrostatic forces between a particle and a surface when the particle is removed from the surface. These include an equation for particle displacement under the electrostatic force, and a numerical calculation for particle displacement under the Van der Waals force. Finally, a kinematic model is constructed to describe the particle distribution under the effects of the electrostatic and Van der Waals forces, as well as the particle＇s Brownian motion. The results show that increasing the multiply of the particle and surface zeta potential values and decreasing the ionic strength of the detergent can prevent a particle from redepos- iting onto a surface.
Bibliography:zeta potential, kinematic model, distribution, Brownian motion, Van der Waals force, electrostatic force, post-CMPcleaning
Nanoparticle movement near a surface is greatly influenced by electrostatic and Van der Waals forces between the particle and the surface, as well as by Brownian motion. In this paper, several precise equations are derived to describe the Van der Waals and electrostatic forces between a particle and a surface when the particle is removed from the surface. These include an equation for particle displacement under the electrostatic force, and a numerical calculation for particle displacement under the Van der Waals force. Finally, a kinematic model is constructed to describe the particle distribution under the effects of the electrostatic and Van der Waals forces, as well as the particle＇s Brownian motion. The results show that increasing the multiply of the particle and surface zeta potential values and decreasing the ionic strength of the detergent can prevent a particle from redepos- iting onto a surface.
11-5845/TH
ObjectType-Article-1
SourceType-Scholarly Journals-1
ObjectType-Feature-2
content type line 23
ISSN:1674-7321
1869-1900
DOI:10.1007/s11431-014-5688-9