Acousto-optic scanning spatial-switching multiphoton lithography

• Published in: International Journal of Extreme Manufacturing Vol. 5; no. 3; pp. 035008 - 35017
• Main Authors: Jiao, Binzhang, Chen, Fayu, Liu, Yuncheng, Fan, Xuhao, Zeng, Shaoqun, Dong, Qi, Deng, Leimin, Gao, Hui, Xiong, Wei
• Format: Journal Article
• Language: English
• Published: Bristol IOP Publishing 01.09.2023
• Subjects: 3-D printers; 3D nano-printing; aberration-free wavefront; acousto-optic scanning; Acousto-optics; Direct laser writing; Foci; Industrial applications; Metamaterials; Micro-optics; Microfluidics; Optical switching; Photonic crystals; spatial-switching; Three dimensional printing
• ISSN: 2631-8644; 2631-7990
• DOI: 10.1088/2631-7990/ace0a7

Abstract Despite of tremendous potential of multiphoton lithography (MPL) in laboratorial and industrial applications, simultaneous achievement of high throughput, high accuracy, high design freedom, and a broad range of material structuring capabilities remains a long-pending challenge. To address the issue, we propose an acousto-optic scanning with spatial-switching multispots (AOSS) method. Inertia-free acousto-optic scanning and nonlinear swept techniques have been developed for achieving ultrahigh-speed and aberration-free scanning. Moreover, a spatial optical switch concept has been implemented to significantly boost the lithography throughput while maintaining high resolution and high design freedom. An eight-foci AOSS system has demonstrated a record-high 3D printing rate of 7.6×10^7 voxel/s, which is nearly one order of magnitude higher than earlier scanning MPL, exhibiting its promise for future scalable 3D nanomanufacturing.