An in-situ approach for preparing atom probe tomography specimens by xenon plasma-focussed ion beam

• Published in: Ultramicroscopy Vol. 202; pp. 121 - 127
• Main Authors: Halpin, J.E., Webster, R.W.H., Gardner, H., Moody, M.P., Bagot, P.A.J., MacLaren, D.A.
• Format: Journal Article
• Language: English
• Published: Netherlands Elsevier B.V 01.07.2019
• Subjects: Atom probe tomography; Focussed ion beam; Sample preparation; Focussed ion beam; Atom probe tomography; Sample preparation
• ISSN: 0304-3991; 1879-2723
• DOI: 10.1016/j.ultramic.2019.04.005

•Atom probe tomography samples are produced in-situ by Xe plasma focussed ion beam.•Production is rapid and automated, obviating need for conventional lift-out method.•TEM analysis confirms negligible Xe damage depth, and free of xe contamination. A method for the rapid preparation of atom probe tomography (APT) needles using a xenon plasma-focussed ion beam (FIB) instrument is presented and demonstrated on a test sample of Ti-6Al-4V alloy. The method requires significantly less operator input than the standard lift-out protocol, is site-specific and produces needles with minimal ion-beam damage; electron microscopy indicated the needle's surface amorphised/oxidised region to be less than 2 nm thick. The resulting needles were routinely analysable by APT, confirming the expected microstructure and showing negligible Xe contamination.