TECHNIQUES FOR TESTING THIN FILMS IN TENSION

Gianola and Sharpe discuss a tensile test method for directly measuring strength and indirectly measuring modulus of a thin film--silicon dioxide. Description of the design and production of specimens, and the test system for gripping, pulling, and measuring force and displacement are presented.

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Published inExperimental techniques (Westport, Conn.) Vol. 28; no. 5; pp. 23 - 27
Main Authors Gianola, D.S., Sharpe Jr, W.N.
Format Journal Article Magazine Article
LanguageEnglish
Published Oxford, UK Blackwell Publishing Ltd 01.09.2004
Springer Nature B.V
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Abstract Gianola and Sharpe discuss a tensile test method for directly measuring strength and indirectly measuring modulus of a thin film--silicon dioxide. Description of the design and production of specimens, and the test system for gripping, pulling, and measuring force and displacement are presented.
AbstractList A review chapters summarized the techniques and procedures for measuring the mechanical properties of freestanding films as of the end of 2000. Test methods can be characterized as direct or indirect. In the former, the property of interest is measured independently, e.g. Young's modulus from separate measurements of force, area, and strain on a tensile specimen. In the latter, a model of the test structure is used, e.g. Young's modulus determined from force, geometry, and displacement of a cantilever beam. This paper presents a tensile test method for directly measuring strength and indirectly measuring modulus of a thin film-silicon dioxide. These techniques are demonstrated in two tests on gold film. The approach is not new, but the detailed experimental techniques may be useful.
Gianola and Sharpe discuss a tensile test method for directly measuring strength and indirectly measuring modulus of a thin film--silicon dioxide. Description of the design and production of specimens, and the test system for gripping, pulling, and measuring force and displacement are presented.
Author Sharpe Jr, W.N.
Gianola, D.S.
Author_xml – sequence: 1
  givenname: D.S.
  surname: Gianola
  fullname: Gianola, D.S.
  organization: D.S. Gianola (SEM Member) is a Graduate Research Assistant, and W.N. Sharpe, Jr. (SEM Member) is the Alonzo G. Decker Professor of Mechanical Engineering, in the Department of Mechanical Engineering at Johns Hopkins University, Baltimore, MD
– sequence: 2
  givenname: W.N.
  surname: Sharpe Jr
  fullname: Sharpe Jr, W.N.
  organization: D.S. Gianola (SEM Member) is a Graduate Research Assistant, and W.N. Sharpe, Jr. (SEM Member) is the Alonzo G. Decker Professor of Mechanical Engineering, in the Department of Mechanical Engineering at Johns Hopkins University, Baltimore, MD
BookMark eNqVkEFPgzAYQBszE7fpfyAe9CLYUmiLiQczGUORZcIyb02pJWGyMekWt38vhGVHE3v5mnzvfYc3AL11tVYAXCNooebdLy1EHWoil1DLhtCxthmEiNnW_gz0T6se6EOKbZMxxC7AQOtlA7mIen1wl_qjSRzO5n5ijKfvRuonaRgHRjoJY2McRm-J0XxSP07CaXwJznNRanV1nEMwH_vpaGJG0yAcPUWmdBDBZuZS4kDm2pIiFzJBpY2QFMJhksBcCYmhRyTB0s4IUgiTT-IxmpMMeQ4lIsdDcNPd3dTV907pLV8VWqqyFGtV7TS3mYMJ82AD3v4NYhcxih3WkA8dKetK61rlfFMXK1EfOIK8TcmXvO3F2168TcmPKfm-kR87-aco1eEfJvc_Uhs3vtn5hd6q_ckX9RcnFFOXL-KAvwYLOltEz_wF_wK79YXu
CODEN EXPTD2
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ContentType Journal Article
Magazine Article
Copyright Copyright Society for Experimental Mechanics, Inc. Sep/Oct 2004
Copyright_xml – notice: Copyright Society for Experimental Mechanics, Inc. Sep/Oct 2004
DBID BSCLL
AAYXX
CITATION
3V.
7TB
7XB
88I
8AF
8AO
8FD
8FE
8FG
8FK
ABJCF
ABUWG
AFKRA
AZQEC
BENPR
BGLVJ
CCPQU
DWQXO
FR3
GNUQQ
HCIFZ
KR7
L6V
M2P
M7S
PQEST
PQQKQ
PQUKI
PTHSS
Q9U
7U5
8BQ
JG9
L7M
DOI 10.1111/j.1747-1567.2004.tb00182.x
DatabaseName Istex
CrossRef
ProQuest Central (Corporate)
Mechanical & Transportation Engineering Abstracts
ProQuest Central (purchase pre-March 2016)
Science Database (Alumni Edition)
STEM Database
ProQuest Pharma Collection
Technology Research Database
ProQuest SciTech Collection
ProQuest Technology Collection
ProQuest Central (Alumni) (purchase pre-March 2016)
Materials Science & Engineering Collection
ProQuest Central (Alumni)
ProQuest Central UK/Ireland
ProQuest Central Essentials
ProQuest Central
Technology Collection
ProQuest One Community College
ProQuest Central
Engineering Research Database
ProQuest Central Student
SciTech Premium Collection (Proquest) (PQ_SDU_P3)
Civil Engineering Abstracts
ProQuest Engineering Collection
Science Database (ProQuest)
ProQuest Engineering Database
ProQuest One Academic Eastern Edition (DO NOT USE)
ProQuest One Academic
ProQuest One Academic UKI Edition
Engineering Collection
ProQuest Central Basic
Solid State and Superconductivity Abstracts
METADEX
Materials Research Database
Advanced Technologies Database with Aerospace
DatabaseTitle CrossRef
ProQuest Central Student
Technology Collection
Technology Research Database
Mechanical & Transportation Engineering Abstracts
ProQuest Central Essentials
ProQuest AP Science
ProQuest Central (Alumni Edition)
SciTech Premium Collection
ProQuest One Community College
ProQuest Pharma Collection
ProQuest Central
ProQuest Engineering Collection
ProQuest Central Korea
Engineering Collection
Civil Engineering Abstracts
Engineering Database
ProQuest Science Journals (Alumni Edition)
ProQuest Central Basic
ProQuest Science Journals
ProQuest One Academic Eastern Edition
ProQuest Technology Collection
ProQuest SciTech Collection
ProQuest One Academic UKI Edition
Materials Science & Engineering Collection
Engineering Research Database
ProQuest One Academic
ProQuest Central (Alumni)
Materials Research Database
Solid State and Superconductivity Abstracts
Advanced Technologies Database with Aerospace
METADEX
DatabaseTitleList Materials Research Database
ProQuest Central Student
Database_xml – sequence: 1
  dbid: 8FG
  name: ProQuest Technology Collection
  url: https://search.proquest.com/technologycollection1
  sourceTypes: Aggregation Database
DeliveryMethod fulltext_linktorsrc
Discipline Engineering
EISSN 1747-1567
EndPage 27
ExternalDocumentID 842542141
10_1111_j_1747_1567_2004_tb00182_x
EXT23
ark_67375_WNG_KGW7QWLD_J
Genre article
Feature
GroupedDBID -EM
-~X
.3N
.4S
.DC
.GA
.Y3
05W
0R~
10A
1OC
203
29G
31~
3V.
4.4
406
50Y
50Z
51W
51X
52M
52N
52O
52P
52S
52T
52W
52X
5GY
5HH
5LA
5VS
66C
6OB
6P2
6TJ
702
7PT
8-0
8-1
8-3
8-4
8-5
88I
8AF
8AO
8FE
8FG
8FW
8R4
8R5
8UM
930
A03
AACDK
AAEOY
AAEVG
AAEWM
AAHHS
AAHNG
AAIAL
AAIKT
AAJBT
AANZL
AAOIN
AAONW
AARHV
AARTL
AASML
AATNV
AATVU
AAUYE
AAYQN
AAYTO
AAZMS
ABAKF
ABBTF
ABCQN
ABDZT
ABECU
ABEFU
ABEML
ABFTV
ABHLI
ABJCF
ABJNI
ABJOX
ABKCH
ABMQK
ABPVW
ABQBU
ABRTZ
ABTAH
ABTEG
ABTKH
ABTMW
ABUWG
ABXPI
ACAOD
ACBEA
ACBWZ
ACCFJ
ACDTI
ACGFS
ACGOD
ACHSB
ACIWK
ACMLO
ACOKC
ACREN
ACSCC
ACXQS
ACZOJ
ADHHG
ADINQ
ADIZJ
ADKNI
ADKPE
ADRFC
ADTPH
ADURQ
ADYFF
ADYOE
ADZKW
ADZOD
AEBTG
AEEZP
AEFQL
AEGXH
AEIMD
AEJHL
AEJRE
AEMSY
AENEX
AEOHA
AEPYU
AEQDE
AESKC
AEVLU
AEXYK
AFBBN
AFBPY
AFFNX
AFKRA
AFQWF
AFZJQ
AFZKB
AGAYW
AGDGC
AGJZZ
AGMZJ
AGQEE
AGQMX
AGRTI
AHBYD
AHEFC
AHKAY
AHSBF
AIAKS
AIGIU
AILAN
AITGF
AIWBW
AJAOE
AJBDE
AJRNO
AJZVZ
ALAGY
ALFXC
ALMA_UNASSIGNED_HOLDINGS
AMBMR
AMKLP
AMTXH
AMXSW
AMYLF
AMYQR
ARCSS
ASPBG
ATUGU
AVWKF
AXYYD
AZBYB
AZQEC
BAFTC
BDRZF
BENPR
BFHJK
BGLVJ
BGNMA
BNHUX
BPHCQ
BROTX
BRXPI
BSCLL
BY8
CAG
CCPQU
COF
CS3
CSCUP
D-E
D-F
DCZOG
DNIVK
DPUIP
DPXWK
DR2
DU5
DWQXO
EBLON
EBS
EDO
EIOEI
EJD
F00
F01
F04
FEDTE
FERAY
FFXSO
FIGPU
FINBP
FNLPD
FRRFC
FSGXE
G-S
G.N
GGCAI
GJIRD
GNUQQ
GODZA
H.T
H.X
HCIFZ
HF~
HOLLA
HVGLF
HZI
HZ~
H~9
I-F
IKXTQ
ITM
IWAJR
IX1
J-C
J0M
JZLTJ
K48
KOV
L6V
LC2
LC3
LH4
LLZTM
LP6
LP7
LW6
M2P
M2Q
M4Y
M7S
MK4
MK~
N04
N05
N9A
NF~
NPVJJ
NQJWS
NU0
O9J
OIG
P2X
P4D
PQQKQ
PROAC
PT4
PTHSS
Q.N
Q11
Q2X
QB0
QF4
QM1
QN7
QO4
R.K
RHV
RLLFE
RNS
ROL
RSV
RWL
RX1
SCG
SCLPG
SISQX
SJYHP
SNE
SNPRN
SNX
SOHCF
SOJ
SPISZ
SRMVM
SSLCW
STPWE
SUPJJ
TAE
TN5
TSG
TUS
UB1
UCJ
UG4
UOJIU
UTJUX
UZXMN
V8K
VFIZW
W48
W8V
W99
WQJ
WRC
WTY
WYUIH
XG1
XSW
Z7R
Z7V
Z7Z
ZMTXR
ZY4
~IA
~WT
AAUCO
ABFGW
ACIPQ
ACWMK
AESTI
AEVTX
AIMYW
AKQUC
1OB
AAYXX
CITATION
7TB
7XB
8FD
8FK
FR3
KR7
PQEST
PQUKI
Q9U
7U5
8BQ
JG9
L7M
ID FETCH-LOGICAL-c4163-b57640852c71508a7c211caa48c60feac3096c63c2b61e136d6987f6b19476af3
IEDL.DBID DR2
ISSN 0732-8818
IngestDate Fri Oct 25 09:40:10 EDT 2024
Fri Oct 25 07:28:30 EDT 2024
Thu Sep 26 19:03:32 EDT 2024
Sat Aug 24 01:03:34 EDT 2024
Wed Oct 30 09:51:03 EDT 2024
IsPeerReviewed false
IsScholarly true
Issue 5
Language English
LinkModel DirectLink
MergedId FETCHMERGED-LOGICAL-c4163-b57640852c71508a7c211caa48c60feac3096c63c2b61e136d6987f6b19476af3
Notes istex:76AB6CEAFFAEB6457B9EE0187FC5F14F94B19C61
ArticleID:EXT23
ark:/67375/WNG-KGW7QWLD-J
content type line 24
ObjectType-Feature-1
SourceType-Magazines-1
ObjectType-Article-2
SourceType-Scholarly Journals-1
content type line 23
PQID 235187348
PQPubID 37666
PageCount 5
ParticipantIDs proquest_miscellaneous_28436890
proquest_miscellaneous_235187348
crossref_primary_10_1111_j_1747_1567_2004_tb00182_x
wiley_primary_10_1111_j_1747_1567_2004_tb00182_x_EXT23
istex_primary_ark_67375_WNG_KGW7QWLD_J
PublicationCentury 2000
PublicationDate September 2004
PublicationDateYYYYMMDD 2004-09-01
PublicationDate_xml – month: 09
  year: 2004
  text: September 2004
PublicationDecade 2000
PublicationPlace Oxford, UK
PublicationPlace_xml – name: Oxford, UK
– name: Bethel
PublicationTitle Experimental techniques (Westport, Conn.)
PublicationYear 2004
Publisher Blackwell Publishing Ltd
Springer Nature B.V
Publisher_xml – name: Blackwell Publishing Ltd
– name: Springer Nature B.V
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2001
2000
2000; 48
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1998; 518
1998; 505
1999; 85
2002; 91
2003; 51
1979; 50
2001; 10
Sharpe W.N. (b11_21) 2000
Sharpe W.N. (b10_20) 1998; 518
b1_11
b2_12
b3_13
b5_15
b6_16
b7_17
b8_18
Tsuchiya T. (b9_19) 1998; 505
Weihs T.P. (b4_14) 1988; 3
b13_23
b14_24
b15_25
Chasiotis I. (b12_22) 2000
b16_26
b17_27
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  ident: b10_20
  publication-title: MRS Symposium
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– ident: b16_26
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– ident: b14_24
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– ident: b5_15
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– ident: b13_23
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– ident: b17_27
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– ident: b8_18
  doi: 10.1016/S0304-3991(02)00089-X
– ident: b3_13
  doi: 10.1063/1.325870
SSID ssj0015179
Score 1.7443494
Snippet Gianola and Sharpe discuss a tensile test method for directly measuring strength and indirectly measuring modulus of a thin film--silicon dioxide. Description...
A review chapters summarized the techniques and procedures for measuring the mechanical properties of freestanding films as of the end of 2000. Test methods...
SourceID proquest
crossref
wiley
istex
SourceType Aggregation Database
Publisher
StartPage 23
SubjectTerms Materials science
Silica
Tensile strength
Testing
SummonAdditionalLinks – databaseName: ProQuest Technology Collection
  dbid: 8FG
  link: http://utb.summon.serialssolutions.com/2.0.0/link/0/eLvHCXMwlV3JTsMwEB2xXODCLsKaA-JERBMndnJCCNKFJRJqqvZm2a5zQWpZJT6fGTepygEhbjkkSjTjzLznGb8BOEusYohCq0C7rZvI2kCnIgtEhrl-rHUrVXTA-bHg3UF8N0pGC6f4a_82YdHF6vHU0Db5ZcSSMCU1lquX14DmRlF9tR6isQyrYZxkNMMgbXfmdQQSoHJCnAz_e8xNtezovJdHBMhfhKOJbo8U0XYjglSnqFWy9tcP_LmIYl0aam_CRqMH7V_PPL4FS3ayDesLsoI7cFHmN92i9zTI-z6SPL_M-2Wv6Phlt1f47d7DY9_HizIvKJDuwqCdlzfdoJ6KEBgCT4FGhkCyZJERpOWuhEEOZ5SKU8NbFcZRhqzEcGYizUMbMj7mWSoqrsMsFlxVbA9WJtOJ3QefpPNDzY0dV3GMUEJVWaqQ0lgqZyYt4wFrDCFfZuIXcoE0oPkkmY9GWcayNp_88uDc2Wz-iHp7pvYxkchh0ZH3naF4Gj7cyjsP_MaoEhc1VSrUxE4_3-Xc0x6c_nZLStr5WcsD7tzxjw-U-aiM2MHfbz-EtVmjDrWUHcHKx9unPUYM8qFP3DL7Botpz4I
  priority: 102
  providerName: ProQuest
Title TECHNIQUES FOR TESTING THIN FILMS IN TENSION
URI https://api.istex.fr/ark:/67375/WNG-KGW7QWLD-J/fulltext.pdf
https://onlinelibrary.wiley.com/doi/abs/10.1111%2Fj.1747-1567.2004.tb00182.x
https://search.proquest.com/docview/235187348
https://search.proquest.com/docview/28436890
Volume 28
hasFullText 1
inHoldings 1
isFullTextHit
isPrint
link http://utb.summon.serialssolutions.com/2.0.0/link/0/eLvHCXMwrV3PT9swFH7a4LIdNvZLBLYuh2knUjVxYifHDdIfDKJBU7U3y3adC1pB0EqIv37vOWnVIjiAuOUQR_Gz33vfZz9_BviRWMUQhVaBdks3kbWBTkUWiAxz_VTrTqrogPNpwfuj-HiSTJrj0XQWptaHWC24kWe4eE0OrvTNppMjFA6QfwhH89waJ6LlNiHKkAmq7zo6X2lJhaRF5TQ5GYYATFONAumqrOfBT21kq20y_O0GFF0HtC4jdd_Dv2Vf6kKUi_Zirtvm7p7M40t1dgfeNdDV_1XPtQ_wys4-wts1QcNPcFDmh_1icDbKhz7SS7_Mh-Wg6Pllf1D43cHJ6dDHhzIvKIR_hlE3Lw_7QXMfQ2AItgUauQkJokVGkIq8EgbZo1EqTg3vVBjBGfIhw5mJNA9tyPiUZ6mouA6zWHBVsS-wNbuc2V3wSbQ_1NzYaRXHCGJUlaUKyZSljdSkYzxgS7vLq1p2Q67RFbSFJFvQJZqxbGwhbz346YZo1URdX1DhmkjkuOjJP72xOBufHMljD_zlGEp0J9ojUTN7ubiREUvClBR_PPj-2CspqfZnHQ-4G7In_KDMJ2XE9p7bcB_e1IVDVOL2Fbbm1wv7DTHRXLfgddrttWD7d178PW-5mf8fBSj6Nw
link.rule.ids 315,783,787,1378,14592,21442,27938,27939,33388,33759,43614,43819,46308,46732
linkProvider Wiley-Blackwell
linkToHtml http://utb.summon.serialssolutions.com/2.0.0/link/0/eLvHCXMwlV1NT9tAEB1ROLS9lFJQTaH4gDjVIvbau_apqsCJDYklFEfJbbW7WV8qJSkfEj-fmY0dpQeEuPlgy9bseua9mdk3AOeJVQxRaBNol7qJrA10KrJAZBjr51r3UkUHnEcVLybxzSyZtb05D21bZecTnaOeLw3lyC8jloQpSbH8Xv0LaGgUFVfbCRofYC9mGGfooHh_sCkikPqUU-Fk-NNjYGo1RzeNPCJA8iIcR3QJUoTanQJSG5_2yNTP_4HPbQjrYlB_H750YtD-n_Vyf4UduziAz1uagt_gV51fFVV5N8nHPjI8v87HdVkN_LooK79fDkdjHy_qvCIvegiTfl5fFUE7EiEwhJwCjfSANMkiI0jIXQmDBM4oFaeG9xp0ogwpieHMRJqHNmR8zrNUNFyHWSy4atgR7C6WC_sdfNLNDzU3dt7EMeII1WSpQj5jqZaZ9IwHrDOEXK2VL-QWY0DzSTIfzbGMZWs--ezBhbPZ5hF1_5d6x0Qip9VA3g6m4m46vJY3HvidUSXuaCpTqIVdPj3IzUp7cPbaLSkJ52c9D7hbjnd8oMxndcSO3377GXws6tFQDsvq9gd8WnfsUG_ZCew-3j_ZUwQjj_qn23IvQq_RVQ
linkToPdf http://utb.summon.serialssolutions.com/2.0.0/link/0/eLvHCXMwrV3Pb9MwFH5Cm4TgwG9E2MZyQJxIlcSJnRzRmrbZuojRVO3Nsl3nMtFNo5Um_vq956RVi-AA4pZDHMXPfu99n_38GeBjahVDFNoE2i3dxNYGOhN5IHLM9Qutw0zRAefLio-myfk8nXfHo-ksTKsPsV1wI89w8Zoc_HbR7Ds5QuEA-YdwNM-tcSJa7iGiPEw4C6nAq_9tKyYVkRiVE-VkGAMwT3USpNu6nt9-ay9dHZLl7_ew6C6idSlp8By-bzrTVqJc99Yr3TM_f9F5_F-9fQHPOuzqf2kn20t4ZJev4OmOouFr-FwXZ6OqvJoWEx_5pV8Xk7qshn49Kit_UI4vJz4-1EVFMfwNTAdFfTYKugsZAkO4LdBITkgRLTaCZOSVMEgfjVJJZnjYYAhnSIgMZybWPLIR4wueZ6LhOsoTwVXD3sLB8mZp34FPqv2R5sYumiRBFKOaPFPIpiztpKah8YBt7C5vW90NucNX0BaSbEG3aCays4W89-CTG6JtE3V3TZVrIpWzaigvhjNxNRv35bkH_mYMJfoTbZKopb1Z_5AxS6OMJH88OP3TKxnJ9uehB9wN2V_8oCzmdcze_2vDU3j8tT-Q47K6OIInbRERlbsdw8Hqbm1PEB-t9Ac37R8A-VX6gA
openUrl ctx_ver=Z39.88-2004&ctx_enc=info%3Aofi%2Fenc%3AUTF-8&rfr_id=info%3Asid%2Fsummon.serialssolutions.com&rft_val_fmt=info%3Aofi%2Ffmt%3Akev%3Amtx%3Ajournal&rft.genre=article&rft.atitle=TECHNIQUES+FOR+TESTING+THIN+FILMS+IN+TENSION&rft.jtitle=Experimental+techniques+%28Westport%2C+Conn.%29&rft.au=Gianola%2C+D.S.&rft.au=Sharpe%2C+W.N.&rft.date=2004-09-01&rft.pub=Blackwell+Publishing+Ltd&rft.issn=0732-8818&rft.eissn=1747-1567&rft.volume=28&rft.issue=5&rft.spage=23&rft.epage=27&rft_id=info:doi/10.1111%2Fj.1747-1567.2004.tb00182.x&rft.externalDBID=10.1111%252Fj.1747-1567.2004.tb00182.x&rft.externalDocID=EXT23
thumbnail_l http://covers-cdn.summon.serialssolutions.com/index.aspx?isbn=/lc.gif&issn=0732-8818&client=summon
thumbnail_m http://covers-cdn.summon.serialssolutions.com/index.aspx?isbn=/mc.gif&issn=0732-8818&client=summon
thumbnail_s http://covers-cdn.summon.serialssolutions.com/index.aspx?isbn=/sc.gif&issn=0732-8818&client=summon