TECHNIQUES FOR TESTING THIN FILMS IN TENSION
Gianola and Sharpe discuss a tensile test method for directly measuring strength and indirectly measuring modulus of a thin film--silicon dioxide. Description of the design and production of specimens, and the test system for gripping, pulling, and measuring force and displacement are presented.
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Published in | Experimental techniques (Westport, Conn.) Vol. 28; no. 5; pp. 23 - 27 |
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Main Authors | , |
Format | Journal Article Magazine Article |
Language | English |
Published |
Oxford, UK
Blackwell Publishing Ltd
01.09.2004
Springer Nature B.V |
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Abstract | Gianola and Sharpe discuss a tensile test method for directly measuring strength and indirectly measuring modulus of a thin film--silicon dioxide. Description of the design and production of specimens, and the test system for gripping, pulling, and measuring force and displacement are presented. |
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AbstractList | A review chapters summarized the techniques and procedures for measuring the mechanical properties of freestanding films as of the end of 2000. Test methods can be characterized as direct or indirect. In the former, the property of interest is measured independently, e.g. Young's modulus from separate measurements of force, area, and strain on a tensile specimen. In the latter, a model of the test structure is used, e.g. Young's modulus determined from force, geometry, and displacement of a cantilever beam. This paper presents a tensile test method for directly measuring strength and indirectly measuring modulus of a thin film-silicon dioxide. These techniques are demonstrated in two tests on gold film. The approach is not new, but the detailed experimental techniques may be useful. Gianola and Sharpe discuss a tensile test method for directly measuring strength and indirectly measuring modulus of a thin film--silicon dioxide. Description of the design and production of specimens, and the test system for gripping, pulling, and measuring force and displacement are presented. |
Author | Sharpe Jr, W.N. Gianola, D.S. |
Author_xml | – sequence: 1 givenname: D.S. surname: Gianola fullname: Gianola, D.S. organization: D.S. Gianola (SEM Member) is a Graduate Research Assistant, and W.N. Sharpe, Jr. (SEM Member) is the Alonzo G. Decker Professor of Mechanical Engineering, in the Department of Mechanical Engineering at Johns Hopkins University, Baltimore, MD – sequence: 2 givenname: W.N. surname: Sharpe Jr fullname: Sharpe Jr, W.N. organization: D.S. Gianola (SEM Member) is a Graduate Research Assistant, and W.N. Sharpe, Jr. (SEM Member) is the Alonzo G. Decker Professor of Mechanical Engineering, in the Department of Mechanical Engineering at Johns Hopkins University, Baltimore, MD |
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Cites_doi | 10.1109/84.946774 10.1557/PROC-505-285 10.1063/1.1708831 10.1557/JMR.1988.0931 10.1557/PROC-518-191 10.1016/S1359-6454(03)00006-5 10.1007/BF02323548 10.1016/S0040-6090(96)09346-7 10.1116/1.1319691 10.1063/1.370146 10.1117/12.284534 10.1016/S1359-6454(99)00294-3 10.1016/S0304-3991(02)00089-X 10.1063/1.325870 |
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Snippet | Gianola and Sharpe discuss a tensile test method for directly measuring strength and indirectly measuring modulus of a thin film--silicon dioxide. Description... A review chapters summarized the techniques and procedures for measuring the mechanical properties of freestanding films as of the end of 2000. Test methods... |
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Title | TECHNIQUES FOR TESTING THIN FILMS IN TENSION |
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