TECHNIQUES FOR TESTING THIN FILMS IN TENSION

Gianola and Sharpe discuss a tensile test method for directly measuring strength and indirectly measuring modulus of a thin film--silicon dioxide. Description of the design and production of specimens, and the test system for gripping, pulling, and measuring force and displacement are presented.

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Bibliographic Details
Published inExperimental techniques (Westport, Conn.) Vol. 28; no. 5; pp. 23 - 27
Main Authors Gianola, D.S., Sharpe Jr, W.N.
Format Journal Article Magazine Article
LanguageEnglish
Published Oxford, UK Blackwell Publishing Ltd 01.09.2004
Springer Nature B.V
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Summary:Gianola and Sharpe discuss a tensile test method for directly measuring strength and indirectly measuring modulus of a thin film--silicon dioxide. Description of the design and production of specimens, and the test system for gripping, pulling, and measuring force and displacement are presented.
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ISSN:0732-8818
1747-1567
DOI:10.1111/j.1747-1567.2004.tb00182.x