Design and Optimization of MEMS Resonant Pressure Sensors with Wide Range and High Sensitivity Based on BP and NSGA-II

With the continuous progress of aerospace, military technology, and marine development, the MEMS resonance pressure sensor puts forward the requirements of not only a wide range but also high sensitivity. However, traditional resonators are hardly compatible with both. In response, we propose a new...

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Bibliographic Details
Published inMicromachines (Basel) Vol. 15; no. 4; p. 509
Main Authors Lv, Mingchen, Li, Pinghua, Miao, Jiaqi, Qiao, Qi, Liang, Ruimei, Li, Gaolin, Zhuang, Xuye
Format Journal Article
LanguageEnglish
Published Switzerland MDPI AG 01.04.2024
Subjects
Accuracy
algorithmic optimization
Algorithms
Deformation
Design
Design optimization
Interference
Islands
Marine technology
MEMS
Microelectromechanical systems
Military technology
Multiple objective analysis
NSGA-II
Optimization
Parameter sensitivity
Pressure sensors
resonant pressure sensor
Sensitivity
Sensors
Silicon
algorithmic optimization
NSGA-II
MEMS
resonant pressure sensor
BP
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Summary:With the continuous progress of aerospace, military technology, and marine development, the MEMS resonance pressure sensor puts forward the requirements of not only a wide range but also high sensitivity. However, traditional resonators are hardly compatible with both. In response, we propose a new sensor structure. By arranging the resonant beam and the sensitive diaphragm vertically in space, the new structure improves the rigidity of the diaphragm without changing the thickness of the diaphragm and achieves the purpose of increasing the range without affecting the sensitivity. To find the optimal structural parameters for the sensor sensitivity and range, and to prevent the effects of modal disturbances, we propose a multi-objective optimization design scheme based on the BP and NSGA-II algorithms. The optimization of the structure parameters not only improved the sensitivity but also increased the interference frequency to solve the issue of mode interference. The optimized structure achieves a sensitivity and range of 4.23 Hz/kPa and 1-10 MPa, respectively. Its linear influence factor is 38.07, significantly higher than that of most resonant pressure sensors. The structural and algorithmic optimizations proposed in this paper provide a new method for designing resonant pressure sensors compatible with a wide range and high sensitivity.
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ISSN:2072-666X
2072-666X
DOI:10.3390/mi15040509