Rapid fabrication of nano-structured quartz stamps
Replication of surface nano-structures from a master stamp allows large-area volume production that is otherwise cost prohibitive through conventional direct-write methods, such as electron beam lithography and focused ion beam milling. However, the creation of a master stamp containing sophisticate...
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Published in | Nanotechnology Vol. 24; no. 5; p. 055304 |
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Main Authors | , , , , , , |
Format | Journal Article |
Language | English |
Published |
Bristol
IOP Publishing
08.02.2013
Institute of Physics |
Subjects | |
Online Access | Get full text |
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Summary: | Replication of surface nano-structures from a master stamp allows large-area volume production that is otherwise cost prohibitive through conventional direct-write methods, such as electron beam lithography and focused ion beam milling. However, the creation of a master stamp containing sophisticated patterns still requires significant time on such direct-write tools. We demonstrate a method for reducing this tool time by patterning smaller nano-structures, and then enlarging them to the desired size through isotropic etching. We can create circular structures of any arrangement and size, down to the patterning limits of the direct-write tools. Subsequent metal mask deposition, lift-off, and anisotropic etching transforms the circular patterns to out-of-plane pillar structures for the final stamp. A 1 cm2 area filled with a pattern of 200 nm diameter nano-holes spaced 520 nm apart, requires only 21 h to complete using our process, compared to 75 h using conventional fabrication. We demonstrate the utility and practicality of the quartz stamps through polymer embossing and replication. Embossed polymer nano-hole arrays are coated with a Cr/Au (5/100 nm) film to create surface plasmon resonance structures. Extraordinary optical transmission spectra from the metallized arrays show the expected spectral features when compared to focused ion beam milled structures. |
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Bibliography: | ObjectType-Article-1 SourceType-Scholarly Journals-1 ObjectType-Feature-2 content type line 23 ObjectType-Article-2 ObjectType-Feature-1 |
ISSN: | 0957-4484 1361-6528 |
DOI: | 10.1088/0957-4484/24/5/055304 |