Cr-doped DLC films in three mid-frequency dual-magnetron power modes

• Published in: Surface & coatings technology Vol. 200; no. 24; pp. 6765 - 6769
• Main Authors: YU XIANG, WANG, Cheng-Biao, LIU YANG, YU, De-Yang, FU, Zhi-Qiang
• Format: Journal Article
• Language: English
• Published: Lausanne Elsevier 01.08.2006
• Subjects: Applied sciences; Cross-disciplinary physics: materials science; rheology; Exact sciences and technology; Materials science; Metals. Metallurgy; Methods of deposition of films and coatings; film growth and epitaxy; Other topics in materials science; Physics; Production techniques; Surface treatment; Plasma; Synthetic diamond; Cr-doped DLC films; Doping; Mid-frequency dual-magnetron sputtering; Waveforms; Surface treatments; Diamond structure; Properties; Carbon; Sputtering; Thin films; Magnetrons; Physical vapor deposition; Wave forms
• ISSN: 0257-8972; 1879-3347
• DOI: 10.1016/j.surfcoat.2005.10.018

A series of Cr-doped diamond-like carbon (DLC) films were deposited using a mid-frequency dual-magnetron sputtering system, whose sputtering sources had three optional power modes of continuous DC, pulsed DC and AC (40 kHz). Morphology, microhardness, adhesion, and friction properties of the films were investigated using scanning electron microscopy, nano-indentation, scratch adhesion testing, ball-on-disc testing, etc. The results exhibited that the driving voltage waveforms played an important role in the properties of the films, and the properties of the films in pulsed DC mode were superior to those in AC mode and continuous DC mode.