Structure and mechanical characteristics of CrAlC films doped with silicon

CrAlC and CrAlSiC films have been obtained and investigated. Simultaneous sputtering of graphite and Cr05Al05 or Cr035Al055Si0 08 targets was used for films deposition. The structure of the films is amorphous-nanocrystalline. The doping of CrAlC films with silicon is accompanied by an increase in th...

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Bibliographic Details
Published inJournal of physics. Conference series Vol. 1281; no. 1; pp. 12065 - 12068
Main Authors Rubshtein, A P, Vladimirov, A B, Plotnikov, S A
Format Journal Article
LanguageEnglish
Published Bristol IOP Publishing 01.07.2019
Subjects
Mechanical properties
Physics
Plastic deformation
Silicon carbide
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Summary:CrAlC and CrAlSiC films have been obtained and investigated. Simultaneous sputtering of graphite and Cr05Al05 or Cr035Al055Si0 08 targets was used for films deposition. The structure of the films is amorphous-nanocrystalline. The doping of CrAlC films with silicon is accompanied by an increase in their crystallinity due to the formation of silicon carbide particles. Structural changes make CrAlSiC films harder with a higher resistance to plastic deformation.
ISSN:1742-6588
1742-6596
DOI:10.1088/1742-6596/1281/1/012065