Modal Properties of Long-Wavelength Tunable MEMS-VCSELs With Curved Mirrors: Comparison of Experiment and Modeling

• Published in: IEEE journal of quantum electronics Vol. 44; no. 4; pp. 391 - 399
• Main Authors: Debernardi, P., Kogel, B., Zogal, K., Meissner, P., Maute, M., Ortsiefer, M., Bohm, G., Amann, M.-C.
• Format: Journal Article
• Language: English
• Published: New York, NY IEEE 01.04.2008; Institute of Electrical and Electronics Engineers; The Institute of Electrical and Electronics Engineers, Inc. (IEEE)
• Subjects: Aluminum; Analytical models; Apertures; Applied sciences; Bragg mirrors; Devices; Electromagnetic coupling; electromagnetic theory; Electronics; Exact sciences and technology; Fundamental areas of phenomenology (including applications); Holes; Laser modes; Laser tuning; Lasers; MEMS; Micro- and nanoelectromechanical devices (mems/nems); Microelectromechanical systems; Micromechanical devices; Mirrors; Optics; Physics; Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices; Semiconductor lasers; laser diodes; Surface waves; Tunable circuits and devices; tunable lasers; Tuning; Vertical cavity surface emission lasers; Vertical cavity surface emitting lasers; vertical-cavity surface-emitting laser (VCSEL); Wavelengths; Ternary compound; Binary compound; Optimization method; electromagnetic theory; surface-emitting laser (VCSEL); Experimental study; Indium phosphide; Gallium Arsenides; Vertical cavity laser; Bragg mirrors; tunable lasers; Aluminium Arsenides; Surface emitting laser; Coupled modes; MEMS; Mirror; Microelectromechanical device; Semiconductor laser; III-V semiconductors; vertical-cavity
• ISSN: 0018-9197; 1558-1713
• DOI: 10.1109/JQE.2007.914773

The effective interplay of simulation and experimental results for analysis and optimization of microelectromechanical system (MEMS)-tunable vertical-cavity surface-emitting lasers (VCSELs) operating at wavelength around 1.55 mum is presented. The VCSEL combines a MEMS with concave Al-GaAs-GaAs mirror membrane and an InP-based active cavity with tunnel junction aperture in a hybrid two-chip assembly. Using electrothermal MEMS actuation the included air-gap can be expanded and the cavity resonance can be tuned to longer wavelengths. The experimental results are compared with the theoretical results provided by VELM (VCSEL ELectroMagnetic), the efficient code based on the coupled mode model and adapted for the first time to handle curved-mirror geometries. The vectorial code is found to be able to fully reproduce the experimental results, such as device tuning range, modal frequency splitting, threshold gains and modal selectivity.