QUINTA equipment for ion-plasma modification of materials and products surface and vacuum arc plasma-assisted deposition of coatings

The paper presents the detailed description of QUINTA experimental equipment for ion-plasma modification of materials and products surface and vacuum arc plasma-assisted deposition of coatings, which was developed at the laboratory of plasma emission electronics of the Institute of High Current Elec...

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Bibliographic Details
Published inJournal of physics. Conference series Vol. 1393; no. 1; pp. 12131 - 12140
Main Authors Shugurov, V V, Koval, N N, Krysina, O V, Prokopenko, N A
Format Journal Article
LanguageEnglish
Published Bristol IOP Publishing 01.11.2019
Subjects
Arc deposition
Electronics
Mechanical properties
Phase composition
Physics
Plasma
Protective coatings
Wear resistance
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Summary:The paper presents the detailed description of QUINTA experimental equipment for ion-plasma modification of materials and products surface and vacuum arc plasma-assisted deposition of coatings, which was developed at the laboratory of plasma emission electronics of the Institute of High Current Electronics SB RAS. It is in the list of unique electrophysical setups of the Russian Federation (UNICUUM). In the paper there is the example of the use of QUINTA setup, it is the vacuum arc plasma-assisted deposition of wear-resistant ZrN-based coatings. The mechanical characteristics of the coatings, the elemental and phase composition are presented.
ISSN:1742-6588
1742-6596
DOI:10.1088/1742-6596/1393/1/012131