Calibrated waveform measurement with high-impedance probes

We develop an on-wafer waveform calibration technique that combines a frequency-domain mismatch correction to account for the effects of the probe on the measurement with an oscilloscope calibration. The mismatch correction is general and can be applied to any type of microwave probe, including scan...

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Bibliographic Details
Published inIEEE transactions on microwave theory and techniques Vol. 51; no. 2; pp. 530 - 535
Main Authors Kabos, P., Reader, H.C., Arz, U., Williams, D.F.
Format Journal Article
LanguageEnglish
Published New York IEEE 01.02.2003
The Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subjects
Calibration
Coplanar waveguides
Distortion
Grounds
Integrated circuit measurements
Microwave measurements
Microwave probes
Microwave theory and techniques
Microwaves
Oscilloscopes
Probes
Reconstruction
Scanning
Transmission line measurements
Voltage measurement
Waveforms
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Summary:We develop an on-wafer waveform calibration technique that combines a frequency-domain mismatch correction to account for the effects of the probe on the measurement with an oscilloscope calibration. The mismatch correction is general and can be applied to any type of microwave probe, including scanning and internal-node probes for noninvasive integrated-circuit tests. We show that, for the commercial high-impedance probe we used, this calibration approach allows accurate on-wafer waveform reconstruction for a variety of probe ground configurations.
Bibliography:ObjectType-Article-2
SourceType-Scholarly Journals-1
ObjectType-Feature-1
content type line 23
ISSN:0018-9480
1557-9670
DOI:10.1109/TMTT.2002.807842