Balanced inductive plasma sources

An approach is proposed for the design of powerful inductive sources with internally compensated anti-phase RF capacitive currents. It is shown that the total internal balance of both capacitive currents and RF magnetic field exist in a full wave helical resonator source. The new plasma source exhib...

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Bibliographic Details
Published inJapanese Journal of Applied Physics Vol. 35; no. 9A; pp. L1130 - L1133
Main Authors VINOGRADOV, G. K, YONEYAMA, S
Format Journal Article
LanguageEnglish
Published Tokyo Japanese journal of applied physics 01.09.1996
Subjects
Exact sciences and technology
Physics
Physics of gases, plasmas and electric discharges
Physics of plasmas and electric discharges
Plasma production and heating
Plasma sources
Design
Instrumentation
Capacitive coupling
RF systems
Inductive discharge
Plasma sources
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Summary:An approach is proposed for the design of powerful inductive sources with internally compensated anti-phase RF capacitive currents. It is shown that the total internal balance of both capacitive currents and RF magnetic field exist in a full wave helical resonator source. The new plasma source exhibits peculiar plasma phenomena having a clear physical interpretation.
ISSN:0021-4922
1347-4065
DOI:10.1143/jjap.35.L1130