New Semiconductor GaNAsBi Alloy Grown by Molecular Beam Epitaxy
GaN y As 1- x - y Bi x epilayers were grown on GaAs by molecular beam epitaxy for the first time. Multilayered samples consisting of GaAs 1- x Bi x , GaN y As 1- y and GaN y As 1- x - y Bi x showed distinct X-ray diffraction (XRD) peaks ascribed to each layer. The GaBi molar fraction, x , estimated...
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Published in | Japanese Journal of Applied Physics Vol. 43; no. 7A; pp. L845 - L847 |
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Main Authors | , , , , , , |
Format | Journal Article |
Language | English |
Published |
01.07.2004
|
Online Access | Get full text |
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Summary: | GaN
y
As
1-
x
-
y
Bi
x
epilayers were grown on GaAs by molecular beam epitaxy for the first time. Multilayered samples consisting of GaAs
1-
x
Bi
x
, GaN
y
As
1-
y
and GaN
y
As
1-
x
-
y
Bi
x
showed distinct X-ray diffraction (XRD) peaks ascribed to each layer. The GaBi molar fraction,
x
, estimated by the combination of Rutherford backscattering spectroscopy and XRD was controlled in a range up to 4.0%. The GaN molar fraction estimated from the angular spacing of the XRD peak between GaAs
1-
x
Bi
x
and GaN
y
As
1-
x
-
y
Bi
x
increased up to 8.0% with increasing supply of activated nitrogen generated in rf plasma. |
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Bibliography: | ObjectType-Article-2 SourceType-Scholarly Journals-1 ObjectType-Feature-1 content type line 23 |
ISSN: | 0021-4922 1347-4065 |
DOI: | 10.1143/JJAP.43.L845 |