Effect of the Temperature of Photonic Annealing on the Structural and Optical Properties of ZnO Films Synthesized by Dual Magnetron-Assisted Sputtering

• Published in: Semiconductors (Woodbury, N.Y.) Vol. 53; no. 2; pp. 255 - 259
• Main Authors: Zaitsev, S. V., Vaschilin, V. S., Kolesnik, V. V., Limarenko, M. V., Prokhorenkov, D. S., Evtushenko, E. I.
• Format: Journal Article
• Language: English
• Published: Moscow Pleiades Publishing 01.02.2019; Springer; Springer Nature B.V
• Subjects: Analysis; ANNEALING; ARGON; COATINGS; Columnar structure; CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY; CONTROLLED ATMOSPHERES; CRYSTAL STRUCTURE; Crystallites; Degree of crystallinity; ELECTRON MICROSCOPY; Fabrication; Magnetic Materials; Magnetic properties; Magnetism; MAGNETRONS; MICROSTRUCTURE; OPTICAL PROPERTIES; Oxide coatings; OXYGEN; Photonics; Physics; Physics and Astronomy; SPUTTERING; SUBSTRATES; TEMPERATURE DEPENDENCE; Testing of Materials and Structures; THIN FILMS; Treatment; Zinc oxide; ZINC OXIDES
• ISSN: 1063-7826; 1090-6479
• DOI: 10.1134/S106378261902026X

Zinc-oxide films 1.4 μm in thickness are deposited onto glassy substrates by the dual magnetron-assisted sputtering of zinc targets in an argon and oxygen gas atmosphere. The dependences of the structural and optical characteristics of the ZnO films on the temperature of postdeposition photonic annealing are studied. It is established that an increase in the annealing temperature yields an increase in the degree of crystallinity of the films. Electron microscopy shows that the deposited ZnO coatings are columnar in structure and the microstructure density and crystallite size increase upon annealing. It is found that, at an annealing temperature of 450–650°C, the optical transmittance increases to >90% in the spectral range 400–1100 nm. The experimental results show that the temperature of vacuum photonic annealing has the most profound effect on the final properties of ZnO coatings.